Scientific Highlights

Datum
Yasin Ekinci, Head of the Laboratory for X-ray Nanoscience and Technologies at PSI, in a clean room laboratory at Swiss Light Source SLS, where extreme ultraviolet light can be used for EUV research.

New process for the production of semiconductors

Media Releases Industrial co-operation Micro- and Nanotechnology

The Paul Scherrer Institute PSI and the Finnish company PiBond to collaborate in the commercialization of advanced EUV semiconductor lithography products.

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Delay vs. photon energy map of an ammonium iron(III) oxalate solution. The large bandwidth emission covers the full XANES range, making time-consuming monochromator scans obsolete.

Efficient transient X-ray absorption spectroscopy

By combining the unique large bandwidth emission mode of SwissFEL’s ARAMIS undulator and diffractive X-ray optics made of diamond, we have demonstrated a new method for time-resolved X-ray absorption near edge structure (XANES) spectroscopy that enables faster data acquisition and requires smaller sample quantities for high-quality data. 

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2024 SPIE Advanced Lithography + Patterning, San Jose, California

2024 SPIE Advanced Lithography + Patterning, San Jose, California

2024 SPIE Advanced Lithography + Patterning symposium hosted leading researchers who are solving challenges in optical and EUV lithography, patterning technologies, metrology, and process integration for semiconductor manufacturing and adjacent applications. The symposium features six conference topics. 

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Best Poster Award at MNE conference 2023, Berlin

LXN post-doctoral researcher Dr. Prajith Karadan wins Best Poster Award at MNE conference 2023, Berlin

The MNE (Micro and Nano Engineering) conference is a prestigious annual event that serves as a global platform for experts, researchers, and innovators in the field of micro and nanotechnology. This conference brings together leading minds from academia and industry to share cutting-edge research, exchange ideas, and explore emerging trends and breakthroughs in the world of micro and nanoengineering.

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