List of Publications of the LXN
2023
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Beck A, Kazazis D, Ekinci Y, Li X, Müller Gubler EA, Kleibert A, et al.
The extent of platinum-induced hydrogen spillover on cerium dioxide
ACS Nano. 2023; 17(2): 1091-1099. https://doi.org/10.1021/acsnano.2c08152
DORA PSI -
Carulla M, Centis Vignali M, Barten R, Baruffaldi F, Bergamaschi A, Borghi G, et al.
Study of the internal quantum efficiency of FBK sensors with optimized entrance windows
Journal of Instrumentation. 2023; 18: C01073 (11 pp.). https://doi.org/10.1088/1748-0221/18/01/C01073
DORA PSI -
Celestre R, Roth T, Detlefs C, Qi P, Cammarata M, Sanchez del Rio M, et al.
Tilting refractive x-ray lenses for fine-tuning of their focal length
Optics Express. 2023; 31(5): 7617-7631. https://doi.org/10.1364/OE.481678
DORA PSI -
Cuxart MG, Perilli D, Tömekce S, Deyerling J, Haag F, Muntwiler M, et al.
Spatial segregation of substitutional B atoms in graphene patterned by the moiré superlattice on Ir(111)
Carbon. 2023; 201: 881-890. https://doi.org/10.1016/j.carbon.2022.09.087
DORA PSI -
D'Anna N, Ferreira Sanchez D, Matmon G, Bragg J, Constantinou PC, Stock TJZ, et al.
Non-destructive X-Ray imaging of patterned Delta-Layer devices in silicon
Advanced Electronic Materials. 2023; 2023: 202201212 (8 pp.). https://doi.org/10.1002/aelm.202201212
DORA PSI -
Flenner S, Hagemann J, Wittwer F, Longo E, Kubec A, Rothkirch A, et al.
Hard X-ray full-field nanoimaging using a direct photon-counting detector
Journal of Synchrotron Radiation. 2023; 30: 390-399. https://doi.org/10.1107/S1600577522012103
DORA PSI -
Le Guyader L, Eschenlohr A, Beye M, Schlotter W, Döring F, Carinan C, et al.
Photon-shot-noise-limited transient absorption soft X-ray spectroscopy at the European XFEL
Journal of Synchrotron Radiation. 2023; 30(2): 284-300. https://doi.org/10.1107/S1600577523000619
DORA PSI -
Leonarski F, Brückner M, Lopez-Cuenca C, Mozzanica A, Stadler H-C, Matěj Z, et al.
Jungfraujoch: hardware-accelerated data-acquisition system for kilohertz pixel-array X-ray detectors
Journal of Synchrotron Radiation. 2023; 30: 227-234. https://doi.org/10.1107/S1600577522010268
DORA PSI -
Manzanillas L, Aplin S, Balerna A, Bell P, Casas J, Cascella M, et al.
Development of multi-element monolithic germanium detectors for X-ray detection at synchrotron facilities
Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment. 2023; 1047: 167904 (5 pp.). https://doi.org/10.1016/j.nima.2022.167904
DORA PSI -
Minissale M, Salomon E, Pappalardo F, Martin C, Muntwiler M, Angot T, et al.
The renaissance and golden age of epitaxial dry germanene
Crystals. 2023; 13(2): 221 (14 pp.). https://doi.org/10.3390/cryst13020221
DORA PSI -
Orsini F, Aplin S, Balerna A, Bell P, Casas J, Cascella M, et al.
XAFS-DET: a new high throughout X-ray spectroscopy detector system developed for synchrotron applications
Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment. 2023; 1045: 167600 (5 pp.). https://doi.org/10.1016/j.nima.2022.167600
DORA PSI -
Reiche S, Bacellar C, Bougiatioti P, Cirelli C, Dijkstal P, Ferrari E, et al.
Frequency and spatially chirped free-electron laser pulses
Physical Review Research. 2023; 5(2): L022009 (7 pp.). https://doi.org/10.1103/PhysRevResearch.5.L022009
DORA PSI -
Reuss T, Nair Lalithambika SS, David C, Döring F, Jooss C, Risch M, et al.
Advancements in liquid jet technology and X-ray spectroscopy for understanding energy conversion materials during operation
Accounts of Chemical Research. 2023; 56(3): 203-214. https://doi.org/10.1021/acs.accounts.2c00525
DORA PSI -
Samadi N, Vila-Comamala J, Shi X, Sanli UT, David C, Stampanoni M, et al.
Refractive axicon for X-ray microscopy applications: design, optimization, and experiment
Optics Express. 2023; 31(2): 2977-2988. https://doi.org/10.1364/OE.478114
DORA PSI -
Sanli UT, Rodgers G, Zdora M-C, Qi P, Garrevoet J, Falch KV, et al.
Apochromatic X-ray focusing
Light: Science & Applications. 2023; 12(1): 107 (8 pp.). https://doi.org/10.1038/s41377-023-01157-8
DORA PSI -
Tseng LT, Karadan P, Kazazis D, Constantinou PC, Stock TJZ, Curson NJ, et al.
Resistless EUV lithography: photon-induced oxide patterning on silicon
Science Advances. 2023; 9(16): eadf5997 (10 pp.). https://doi.org/10.1126/sciadv.adf5997
DORA PSI -
Ukleev V, Burian M, Gliga S, Vaz CAF, Rösner B, Fainozzi D, et al.
Effect of intense x-ray free-electron laser transient gratings on the magnetic domain structure of Tm:YIG
Journal of Applied Physics. 2023; 133(12): 123902 (6 pp.). https://doi.org/10.1063/5.0119241
DORA PSI -
Vladimirova NV, Frolov AS, Sánchez-Barriga J, Clark OJ, Matsui F, Usachov DY, et al.
Occupancy of lattice positions probed by X-ray photoelectron diffraction: a case study of tetradymite topological insulators
Surfaces and Interfaces. 2023; 36: 102516 (10 pp.). https://doi.org/10.1016/j.surfin.2022.102516
DORA PSI -
Wang Z, Chen J, Yu T, Zeng Y, Guo X, Wang S, et al.
Sulfonium-functionalized polystyrene-based nonchemically amplified resists enabling sub-13 nm nanolithography
ACS Applied Materials and Interfaces. 2023; 15(1): 2289-2300. https://doi.org/10.1021/acsami.2c19940
DORA PSI -
Wu X, Pan Z, Steglich M, Ascher P, Bodi A, Bjelić S, et al.
A direct liquid sampling interface for photoelectron photoion coincidence spectroscopy
Review of Scientific Instruments. 2023; 94(3): 034103 (9 pp.). https://doi.org/10.1063/5.0136665
DORA PSI
2022
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Ahsan A, Buimaga-Iarinca L, Nijs T, Nowakowska S, Sk R, Mousavi SF, et al.
Induced fit and mobility of cycloalkanes within nanometer-sized confinements at 5 K
Journal of Physical Chemistry Letters. 2022; 13(32): 7504-7513. https://doi.org/10.1021/acs.jpclett.2c01592
DORA PSI -
Allenet T, Vockenhuber M, Yeh C-K, Santaclara JG, van Lent-Protasova L, Ekinci Y, et al.
EUV resist screening update: progress towards High-NA lithography
In: Sanders DP, Guerrero D, eds. Advances in patterning materials and processes XXXIX. Vol. 12055. Proceedings of SPIE. Bellingham: SPIE; 2022:120550F (10 pp.). https://doi.org/10.1117/12.2614171
DORA PSI -
Alyabyeva N, Ding J, Sauty M, Woerle J, Jousseaume Y, Ferro G, et al.
Nanoscale mapping of sub-gap electroluminescence from step-bunched, oxidized 4H-SiC surfaces
Physica Status Solidi B: Basic Research. 2022. https://doi.org/10.1002/pssb.202200356
DORA PSI -
Armand Pilon FT, Niquet Y-M, Chretien J, Pauc N, Reboud V, Calvo V, et al.
Investigation of lasing in highly strained germanium at the crossover to direct band gap
Physical Review Research. 2022; 4(3): 033050 (17 pp.). https://doi.org/10.1103/PhysRevResearch.4.033050
DORA PSI -
Beckert A, Grimm M, Hermans RI, Freeman JR, Linfield EH, Davies AG, et al.
Precise determination of the low-energy electronuclear Hamiltonian of LiY1-xHoxF4
Physical Review B. 2022; 106(11): 115119 (11 pp.). https://doi.org/10.1103/PhysRevB.106.115119
DORA PSI -
Bergamaschi A, Andrä M, Barten R, Baruffaldi F, Brückner M, Carulla M, et al.
First demonstration of on-chip interpolation using a single photon counting microstrip detector
Journal of Instrumentation. 2022; 17(11): C11012 (9 pp.). https://doi.org/10.1088/1748-0221/17/11/C11012
DORA PSI -
Bespin C, Berdalovic I, Caicedo I, Cardella R, Dingfelder J, Flores L, et al.
Development and characterization of a DMAPS chip in TowerJazz 180nm technology for high radiation environments
Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment. 2022; 1040: 167189 (6 pp.). https://doi.org/10.1016/j.nima.2022.167189
DORA PSI -
Chiriotti S, Barten R, Bergamaschi A, Brückner M, Carulla M, Chsherbakov I, et al.
High-spatial resolution measurements with a GaAs:Cr sensor using the charge integrating MÖNCH detector with a pixel pitch of 25 μm
Journal of Instrumentation. 2022; 17: P04007 (17 pp.). https://doi.org/10.1088/1748-0221/17/04/P04007
DORA PSI -
Collé D, Erjawetz J, Ekindorf G, Heyl P, Ritter D, Reddy A, et al.
Bend the curve – shape optimization in laser grayscale direct write lithography using a single figure of merit
Micro and Nano Engineering. 2022; 15: 100137 (9 pp.). https://doi.org/10.1016/j.mne.2022.100137
DORA PSI -
Dwivedi N, Balasubramanian K, Sahu R, Manna S, Banik S, Dhand C, et al.
Unusual high hardness and load-dependent mechanical characteristics of hydrogenated carbon-nitrogen hybrid films
ACS Applied Materials and Interfaces. 2022; 14(17): 20220-20229. https://doi.org/10.1021/acsami.2c01508
DORA PSI -
Evrard Q, Sadegh N, Ekinci Y, Vockenhuber M, Mahne N, Giglia A, et al.
Influence of counteranions on the performance of tin-based EUV photoresists
Journal of Photopolymer Science and Technology. 2022; 35(1): 95-100. https://doi.org/10.2494/photopolymer.35.95
DORA PSI -
Fanciulli M, Pancaldi M, Pedersoli E, Vimal M, Bresteau D, Luttmann M, et al.
Magnetic helicoidal dichroism with XUV light carrying orbital angular momentum
In: Proceedings the international conference on ultrafast phenomena (UP) 2022. International conference on ultrafast phenomena. Washington, DC: Optica Publishing Group; 2022:Tu2A.4 (2 pp.). https://doi.org/10.1364/UP.2022.Tu2A.4
DORA PSI -
Fanciulli M, Pancaldi M, Pedersoli E, Vimal M, Bresteau D, Luttmann M, et al.
Magnetic helicoidal dichroism with XUV light carrying orbital angular momentum
In: Laasch W, Tschentscher T, eds. 14th international conference on synchrotron radiation instrumentation (SRI 2021). Vol. 2380. Journal of physics: conference series. Bristol; Philadelphia: IOP Publishing; 2022:012129 (6 pp.). https://doi.org/10.1088/1742-6596/2380/1/012129
DORA PSI -
Fanciulli M, Pancaldi M, Pedersoli E, Vimal M, Bresteau D, Luttmann M, et al.
Observation of magnetic helicoidal dichroism with extreme ultraviolet light vortices
Physical Review Letters. 2022; 128(7): 077401 (7 pp.). https://doi.org/10.1103/PhysRevLett.128.077401
DORA PSI -
Finizio S, Bailey JB, Olsthoorn B, Raabe J
Periodogram-based detection of unknown frequencies in time-resolved scanning transmission X-ray microscopy
ACS Nano. 2022; 16(12): 21071-21078. https://doi.org/10.1021/acsnano.2c08874
DORA PSI -
Flenner S, Hagemann J, Storm M, Kubec A, Qi P, David C, et al.
Hard X-ray nanotomography at the P05 imaging beamline at PETRA III
In: Müller B, Wang G, eds. Developments in X-Ray tomography XIV. Vol. 12242. Proceedings of SPIE. Bellingham: SPIE; 2022:122420L (8 pp.). https://doi.org/10.1117/12.2632706
DORA PSI -
Frolov AS, Usachov DY, Fedorov AV, Vilkov OY, Golyashov V, Tereshchenko OE, et al.
Ferromagnetic layers in a topological insulator (Bi,Sb)2Te3 crystal doped with Mn
ACS Nano. 2022; 16(12): 20831-20841. https://doi.org/10.1021/acsnano.2c08217
DORA PSI -
Fröjdh E, Baruffaldi F, Bergamaschi A, Carulla M, Dinapoli R, Greiffenberg D, et al.
Detection of MeV electrons using a charge integrating hybrid pixel detector
Journal of Instrumentation. 2022; 17(12): C12004 (8 pp.). https://doi.org/10.1088/1748-0221/17/12/C12004
DORA PSI -
Fröjdh E, Abrahams JP, Andrä M, Barten R, Bergamaschi A, Brückner M, et al.
Electron detection with CdTe and GaAs sensors using the charge integrating hybrid pixel detector JUNGFRAU
Journal of Instrumentation. 2022; 17: C01020 (12 pp.). https://doi.org/10.1088/1748-0221/17/01/C01020
DORA PSI -
Glazyrin K, Khandarkhaeva S, Fedotenko T, Dong W, Laniel D, Seiboth F, et al.
Sub-micrometer focusing setup for high-pressure crystallography at the Extreme Conditions beamline at PETRA III
Journal of Synchrotron Radiation. 2022; 29: 654-663. https://doi.org/10.1107/S1600577522002582
DORA PSI -
Grimes M, Gurung N, Ueda H, Porter DG, Pedrini B, Heyderman LJ, et al.
X-ray investigation of long-range antiferromagnetic ordering in FeRh
AIP Advances. 2022; 12(3): 035048 (5 pp.). https://doi.org/10.1063/9.0000320
DORA PSI -
Heymes J, Ivory J, Stefanov K, Buggey T, Hetherington O, Soman M, et al.
Characterisation of a soft X-ray optimised CMOS Image Sensor
Journal of Instrumentation. 2022; 17(5): P05003 (16 pp.). https://doi.org/10.1088/1748-0221/17/05/P05003
DORA PSI -
Hinger V, al Haddad A, Barten R, Bergamaschi A, Brückner M, Carulla M, et al.
Advancing the JUNGFRAU detector toward low-energy X-ray applications
Journal of Instrumentation. 2022; 17(9): C09027 (7 pp.). https://doi.org/10.1088/1748-0221/17/09/C09027
DORA PSI -
Kang BJ, Rohrbach D, Brunner FDJ, Bagiante S, Sigg H, Feurer T
Ultrafast and low-threshold THz mode switching of two-dimensional nonlinear metamaterials
Nano Letters. 2022; 22(5): 2016-2022. https://doi.org/10.1021/acs.nanolett.1c04776
DORA PSI -
Kim HS, Nebling R, Dejkameh A, Shen T, Ekinci Y, Mochi I
Photon flux dependent image resolution of reflective ptychographic microscope for extreme ultraviolet actinic mask metrology
Journal of Micro/Nanopatterning, Materials, and Metrology. 2022; 21(3): 34002 (12 PP.). https://doi.org/10.1117/1.JMM.21.3.034002
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Korzyński MD, Bernhardt M, Romankov V, Dreiser J, Matmon G, Pointillart F, et al.
Cyclooctatetraenide-based single-ion magnets featuring bulky cyclopentadienyl ligand
Chemical Science. 2022; 13(35): 10574-10580. https://doi.org/10.1039/D2SC02560D
DORA PSI -
Koutsouflakis E, Krylov D, Bachellier N, Sostina D, Dubrovin V, Liu F, et al.
Metamagnetic transition and a loss of magnetic hysteresis caused by electron trapping in monolayers of single-molecule magnet Tb2@C79N
Nanoscale. 2022; 14(27): 9877-9892. https://doi.org/10.1039/d1nr08475e
DORA PSI -
Kubec A, Zdora M-C, Sanli UT, Diaz A, Vila-Comamala J, David C
An achromatic X-ray lens
Nature Communications. 2022; 13: 1305 (7 pp.). https://doi.org/10.1038/s41467-022-28902-8
DORA PSI -
Kubec A, Samadi N, Langer M, Döring F, Rösner B, Guzenko VA, et al.
Slope error correction on X-ray reflection gratings by a variation of the local line density
Optics Express. 2022; 30(26): 46248-46258. https://doi.org/10.1364/OE.471438
DORA PSI -
Kubec A, Döring F
XRnanotech - recent developments in nanostructured X-ray and EUV optics
In: Compact EUV & X-ray light sources 2022. Vol. EF3A. High-brightness sources and light-driven interactions. Washington, DC: Optica Publishing Group; 2022:EF3A.3. https://doi.org/10.1364/EUVXRAY.2022.EF3A.3
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Kurzhals P, Kremer G, Jaouen T, Nicholson CW, Heid R, Nagel P, et al.
Electron-momentum dependence of electron-phonon coupling underlies dramatic phonon renormalization in YNi2B2C
Nature Communications. 2022; 13(1): 228 (9 pp.). https://doi.org/10.1038/s41467-021-27843-y
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Küchle JT, Baklanov A, Seitsonen AP, Ryan PTP, Feulner P, Pendem P, et al.
Silicene's pervasive surface alloy on Ag(111): a scaffold for two-dimensional growth
2D Materials. 2022; 9(4): 045021 (13 pp.). https://doi.org/10.1088/2053-1583/ac8a01
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Lee WC, Sagehashi R, Zhang Y, Popov AA, Muntwiler M, Greber T
X-ray absorption measurements at a bending magnet beamline with an Everhart–Thornley detector: a monolayer of Ho3N@C80 on graphene
Journal of Vacuum Science and Technology A: Vacuum, Surfaces, and Films. 2022; 40(5): 053205 (3 pp.). https://doi.org/10.1116/6.0001961
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Lewis SM, Alty HR, Vockenhuber M, DeRose GA, Fernandez-Mato A, Kazazis D, et al.
Sensitivity enhancement of a high-resolution negative-tone nonchemically amplified metal organic photoresist for extreme ultraviolet lithography
Journal of Micro/Nanopatterning, Materials, and Metrology. 2022; 21(4): 041404 (9 pp.). https://doi.org/10.1117/1.JMM.21.4.041404
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Lyubomirskiy M, Wittwer F, Kahnt M, Koch F, Kubec A, Falch KV, et al.
Multi-beam X-ray ptychography using coded probes for rapid non-destructive high resolution imaging of extended samples
Scientific Reports. 2022; 12(1): 6203 (9 pp.). https://doi.org/10.1038/s41598-022-09466-5
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Ma J-Z, Zhang S-N, Song JP, Wu Q-S, Ekahana SA, Naamneh M, et al.
Giant Chern number of a Weyl nodal surface without upper limit
Physical Review B. 2022; 105(11): 115118 (8 pp.). https://doi.org/10.1103/PhysRevB.105.115118
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Meyer M, Andrä M, Barten R, Bergamaschi A, Brückner M, Busca P, et al.
Observation of radiation damage in CdTe Schottky sensors created by 20 keV photons
Journal of Instrumentation. 2022; 17(6): P06035 (22 pp.). https://doi.org/10.1088/1748-0221/17/06/P06035
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Mokhtarzadeh M, Carulla M, Kozak R, David C
Optimization of etching processes for the fabrication of smooth silicon carbide membranes for applications in quantum technology
Micro and Nano Engineering. 2022; 16: 100155 (7 pp.). https://doi.org/10.1016/j.mne.2022.100155
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Mortelmans T, Kazazis D, Werder J, Kristiansen PM, Ekinci Y
Injection molding of thermoplastics for low-cost nanofluidic devices
ACS Applied Nano Materials. 2022; 5(12): 17758-17766. https://doi.org/10.1021/acsanm.2c03731
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Mortelmans T, Kazazis D, Padeste C, Berger P, Li X, Ekinci Y
Poly(methyl methacrylate)-based nanofluidic device for rapid and multiplexed serological antibody detection of SARS-CoV-2
ACS Applied Nano Materials. 2022; 5(1): 517-526. https://doi.org/10.1021/acsanm.1c03309
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Moustakas K, Noulis T, Siskos S
20 GHz substrate crosstalk sensor for mobile communication applications
International Journal of Electronics Letters. 2022. https://doi.org/10.1080/21681724.2022.2129807
DORA PSI -
Moustakas K, Noulis T, Siskos S
Compact ground bounce sensors for SoC energy harvesting applications
In: 2022 11th international conference on modern circuits and systems technologies (MOCAST 2022). International conference on modern circuits and systems technologies (MOCAST). Piscataway, NJ: IEEE; 2022:21928980 (4 pp.). https://doi.org/10.1109/MOCAST54814.2022.9837552
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Moustakas K, Noulis T
Wide band differential on-chip monitoring of system on chip power supplies noise
AEU - International Journal of Electronics and Communications. 2022; 154: 154311 (10 pp.). https://doi.org/10.1016/j.aeue.2022.154311
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Mraz A, Venturini R, Svetin D, Sever V, Mihailovic IA, Vaskivskyi I, et al.
Charge configuration memory devices: energy efficiency and switching speed
Nano Letters. 2022; 22(12): 4814-4821. https://doi.org/10.1021/acs.nanolett.2c01116
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Nasr Esfahani M, Zare Pakzad S, Li T, Li XF, Tasdemir Z, Wollschläger N, et al.
Effect of native oxide on stress in silicon nanowires: implications for nanoelectromechanical systems
ACS Applied Nano Materials. 2022; 5(9): 13276-13285. https://doi.org/10.1021/acsanm.2c02983
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Penco G, Perosa G, Allaria E, Badano L, Bencivenga F, Brynes A, et al.
Nonlinear harmonics of a seeded free-electron laser as a coherent and ultrafast probe to investigate matter at the water window and beyond
Physical Review A. 2022; 105(5): 053524 (14 pp.). https://doi.org/10.1103/PhysRevA.105.053524
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Qi P, Shvyd'ko Y
Signatures of misalignment in x-ray cavities of cavity-based x-ray free-electron lasers
Physical Review Accelerators and Beams. 2022; 25(5): 050701 (20 pp.). https://doi.org/10.1103/PhysRevAccelBeams.25.050701
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Reiche S, Knopp G, Pedrini B, Prat E, Aeppli G, Gerber S
A perfect X-ray beam splitter and its applications to time-domain interferometry and quantum optics exploiting free-electron lasers
Proceedings of the National Academy of Sciences of the United States of America PNAS. 2022; 119(7): e2117906119 (5 pp.). https://doi.org/10.1073/pnas.2117906119
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Rouxel JR, Rösner B, Karpov D, Bacellar C, Mancini GF, Zinna F, et al.
Hard X-ray helical dichroism of disordered molecular media
Nature Photonics. 2022; 16(8): 570-574. https://doi.org/10.1038/s41566-022-01022-x
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Saifullah MSM, Asbahi M, Neo DCJ, Mahfoud Z, Tan HR, Ha ST, et al.
Patterning at the resolution limit of commercial electron beam lithography
Nano Letters. 2022; 22(18): 7432-7440. https://doi.org/10.1021/acs.nanolett.2c02339
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Saifullah MSM, Tiwale N, Ganesan R
Review of metal-containing resists in electron beam lithography: perspectives for extreme ultraviolet patterning
Journal of Micro/Nanopatterning, Materials, and Metrology. 2022; 21(4): 041402 (35 pp.). https://doi.org/10.1117/1.JMM.21.4.041402
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Samadi N, Shi X, Ozkan Loch C, Krempasky J, Boege M, Chapman D, et al.
A spatial beam property analyzer based on dispersive crystal diffraction for low-emittance X-ray light sources
Scientific Reports. 2022; 12(1): 18267 (9 pp.). https://doi.org/10.1038/s41598-022-23004-3
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Scheel M, Perrin J, Koch F, Daniel G, Giorgetta JL, Cauchon G, et al.
Current status of hard X-ray nano-tomography on the transmission microscope at the ANATOMIX beamline
In: Laasch W, Tschentscher T, eds. 14th international conference on synchrotron radiation instrumentation (SRI 2021). Vol. 2380. Journal of physics: conference series. Bristol; Philadelphia: IOP Publishing; 2022:012045(5 pp.). https://doi.org/10.1088/1742-6596/2380/1/012045
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Schroer CG, Seiboth F, Schropp A, Achilles S, Seyrich M, Patjens S, et al.
Hard X-ray wavefront engineering for aberration correction and beam shaping
In: Khounsary AM, Mimura H, Morawe C, eds. Advances in X-ray/EUV optics and components XVII. Vol. 12240. Proceedings of SPIE. Bellingham: SPIE; 2022:122400J (8 pp.). https://doi.org/10.1117/12.2633458
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Schunck JO, Döring F, Rösner B, Buck J, Engel RY, Miedema PS, et al.
Microstructure effects on the phase transition behavior of a prototypical quantum material
Scientific Reports. 2022; 12(1): 10464 (7 pp.). https://doi.org/10.1038/s41598-022-13872-0
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Seiboth F, Kubec A, Schropp A, Niese S, Gawlitza P, Garrevoet J, et al.
Rapid aberration correction for diffractive X-ray optics by additive manufacturing
Optics Express. 2022; 30(18): 31519-31529. https://doi.org/10.1364/OE.454863
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Shen T, Kazazis D, Kim H-S, Dejkameh A, Nebling R, Ekinci Y, et al.
EUV mask defect material characterization through actinic lensless imaging
In: Robinson JC, Sendelbach MJ, eds. Metrology, inspection, and process control XXXVI. Vol. 12053. Proceedings of SPIE. Bellingham: SPIE; 2022:120530H (8 pp.). https://doi.org/10.1117/12.2613337
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Shen T, Ekinci Y, Mochi I
Reflective grazing incidence EUV nanoscope for wafer metrology
In: Itani T, Naulleau PP, Gargini PA, Ronse KG, eds. International conference on extreme ultraviolet lithography 2022. Vol. 12292. Proceedings of SPIE. Bellingham, USA: SPIE; 2022:122920O (7 pp.). https://doi.org/10.1117/12.2641776
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