Skip to main content
  • Paul Scherrer Institut PSI
  • PSI Research, Labs & User Services

Digital User Office

  • Digital User Office
  • DE
  • EN
  • FR
Paul Scherrer Institut (PSI)
Search
Paul Scherrer Institut (PSI)

Hauptnavigation

  • Research at PSIOpen mainmenu item
    • Research Initiatives
    • Ethics and Research integrity
    • Scientific Highlights
    • Scientific Events
    • Scientific Career
    • PSI-FELLOW
    • PSI Data Policy
  • Research Divisions and LabsOpen mainmenu item
    • Overview
    • Research with Neutrons and Muons
    • Photon Science
    • Energy and Environment
    • Nuclear Energy and Safety
    • Biology and Chemistry
    • Scientific Computing, Theory and Data
    • Large Research Facilities
  • Facilities and InstrumentsOpen mainmenu item
    • Overview
    • Large Research Facilities
    • Facilities
    • PSI Facility Newsletter
  • PSI User ServicesOpen mainmenu item
    • User Office
    • Methods at the PSI User Facilities
    • Proposals for beam time
    • Proposal Deadlines
    • Data Analysis Service (PSD)
    • EU support programmes
  • New ProjectsOpen mainmenu item
    • SLS 2.0
    • IMPACT
  • DE
  • EN
  • FR

Digital User Office (mobile)

  • Digital User Office

You are here:

  1. PSI Home
  2. Labs & User Services
  3. PSD
  4. LXN
  5. Facilities and Equipment

Secondary navigation

Laboratory for X-ray Nanoscience and Technologies (LXN)

  • About LXN
    • Organisational Structure
  • Open Positions
  • People
  • Research Groups
    • X-ray Nano-Optics
      • X-ray Optics for Imaging and Spectroscopy
        • Fresnel Zone Plate for X-ray Microscopy
        • Blazed X-ray Optics
        • Zernike X-ray Phase Contrast Microscopy
        • Fresnel Zone Plates for RIXS
        • Refractive Lenses by 2 Photon 3D Lithography
      • Wavefront Metrology and Manipulation
        • Vortex Fresnel Zone Plates
        • Grating-based Wavefront Metrology
      • X-ray Optics for XFELs
        • Diamond Fresnel Zone Plates
        • Beam Splitter Gratings for Spectral Monitoring
        • A Delay Line for Ultrafast Pump-Probe Experiments
        • X-ray Streaking for Ultrafast Processes
    • Molecular Nanoscience
      • On-surface Chemistry
      • Spins in Molecular Monolayers
      • SiC: Surfaces and Interfaces
      • Our Research Team
    • Advanced Lithography and Metrology
      • EUV Interference Lithography
      • EUV Lensless Imaging
      • ALM Nanoscience
    • Quantum Photon Science
      • News and highlights
      • People
      • Open positions
      • Current projects
        • Imaging quantum many-body states
        • Nonlinear magnonics
        • Optical devices & methods
        • Rare-earth quantum magnets
        • Rydberg states in Si ∂-layers
        • Strained Ge laser (former research activity of H. Sigg & collaborators)
        • Van der Waals materials & devices
      • Infrastructure
        • Cristallina-Q
        • IR beamline
        • Nano-fabrication
      • Publications
      • QTC@PSI
    • Detectors
      • Projects
        • MYTHEN
        • GOTTHARD
        • EIGER
        • JUNGFRAU
        • MOENCH
        • AGIPD
        • Documentation
        • Software Releases
      • Research
      • Detectors Scientific Highlights
      • Publications
      • Team
  • Facilities and Equipment Expanded submenu item
    • Surface Science Lab
    • Scanning Electron Microscopy
    • Scanning Probe Microscopy
    • PEARL Beamline
    • XIL Facility at the SLS
    • Cleanroom Labs
  • Scientific Highlights and News
    • Archive
  • Publications
    • Archive

Laboratory for Micro- and Nanotechnology

Laboratories

Cleanrooms

cl1.jpg
Cleanroom Laboratories

Surface Science Lab

Surface Science Lab

Microscopy Labs


Zeiss VP55 Scanning electron microscope
SEM.jpg
Scanning Electron Microscopy

AFM.jpg
Scanning Probe Microscopy

Beamlines and Endstations

XIL Beamline Cleanroom
XIL-II (X09LB): EUV Beamline at SLS

PEARL Beamline Enstation
PEARL (X03DA): Photoemission and Atomic Resolution Laboratory

X01DC
IR Beamline (X01DC): Ultra high resolution FTIR

Cristallina-Q Endstation
Cristallina-Q: Quantum Science at SwissFEL

Facilities

XIL Facility at SLS

XIL.jpg

XIL Facility at the SLS

Nanoimprint Lithography

NIL.jpg

Nanoimprint Lithography

Electron Beam Lithography

ebeam.jpg

Electron Beam Lithography
top

Footer

Paul Scherrer Institut

Forschungsstrasse 111
5232 Villigen PSI
Switzerland

Telephone: +41 56 310 21 11
Telefax: +41 56 310 21 99

How to find us
Contact

Visitor Centre psi forum
School Lab iLab (in German)
Center for Proton Therapy
PSI Education Centre
PSI Guest House
PSI Gastronomie (in German)
psi forum shop

Service & Support

  • Phone Book
  • User Office
  • Accelerator Status
  • PSI Publications
  • Suppliers
  • E-Billing
  • Computing
  • Safety (in German)

Career

  • Working at PSI
  • Job Opportunities
  • Training and further education
  • Career Center
  • Vocational Training (in German)
  • PSI Education Center

For the media

  • PSI in brief
  • Facts and Figures
  • Media corner
  • Media Releases
  • Social Media

Follow us: Twitter (in English) LinkedIn Youtube Facebook Instagram Issuu RSS

Footer legal

  • Imprint
  • Terms and Conditions
  • Editors' login