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Facilities & Equipment

Laboratories

Cleanrooms

Surface Science Lab

Zeiss VP55 Scanning electron microscope

Microscopy Labs

Beamlines and Endstations

XIL Beamline Cleanroom

XIL-II (X09LB)

EUV Beamline at SLS

PEARL Beamline Enstation

PEARL (X03DA)

Photoemission and Atomic Resolution Laboratory

X01DC

IR Beamline (X01DC)

Ultra high resolution FTIR

Cristallina-Q Endstation

Cristallina-Q

Quantum Science at SwissFEL

Facilities

XIL Beamline Cleanroom

XIL Facility at SLS

Nanoimprint Lithography

Electron Beam Lithography