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Laboratory for X-ray Nanoscience and Technologies (LXN)

  • About LXN
    • Organisational Structure
  • Open Positions
  • People
  • Research Groups
    • X-ray Nano-Optics
      • X-ray Optics for Imaging and Spectroscopy
        • Fresnel Zone Plate for X-ray Microscopy
        • Blazed X-ray Optics
        • Zernike X-ray Phase Contrast Microscopy
        • Fresnel Zone Plates for RIXS
        • Refractive Lenses by 2 Photon 3D Lithography
      • Wavefront Metrology and Manipulation
        • Vortex Fresnel Zone Plates
        • Grating-based Wavefront Metrology
      • X-ray Optics for XFELs
        • Diamond Fresnel Zone Plates
        • Beam Splitter Gratings for Spectral Monitoring
        • A Delay Line for Ultrafast Pump-Probe Experiments
        • X-ray Streaking for Ultrafast Processes
    • Molecular Nanoscience
      • On-surface Chemistry
      • Spins in Molecular Monolayers
      • SiC: Surfaces and Interfaces
      • Our Research Team
    • Advanced Lithography and Metrology
      • EUV Interference Lithography
      • EUV Lensless Imaging
      • ALM Nanoscience
    • Quantum Photon Science
      • News and highlights
      • People
      • Open positions
      • Current projects
        • Imaging quantum many-body states
        • Nonlinear magnonics
        • Optical devices & methods
        • Rare-earth quantum magnets
        • Rydberg states in Si ∂-layers
        • Strained Ge laser (former research activity of H. Sigg & collaborators)
        • Van der Waals materials & devices
      • Infrastructure
        • Cristallina-Q
        • IR beamline
        • Nano-fabrication
      • Publications
      • QTC@PSI
    • Detectors
      • Projects
        • MYTHEN
        • GOTTHARD
        • EIGER
        • JUNGFRAU
        • MOENCH
        • AGIPD
        • Documentation
        • Software Releases
      • Research
      • Detectors Scientific Highlights
      • Publications
      • Team
  • Facilities and Equipment Sous-menu élargi
    • Surface Science Lab
    • Scanning Electron Microscopy
    • Scanning Probe Microscopy
    • PEARL Beamline
    • XIL Facility at the SLS
    • Cleanroom Labs
  • Scientific Highlights and News
    • Archive
  • Publications
    • Archive

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Laboratory for Micro- and Nanotechnology

Laboratories

Cleanrooms

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Cleanroom Laboratories

Surface Science Lab

Surface Science Lab

Microscopy Labs


Zeiss VP55 Scanning electron microscope
SEM.jpg
Scanning Electron Microscopy

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Scanning Probe Microscopy

Beamlines and Endstations

XIL Beamline Cleanroom
XIL-II (X09LB): EUV Beamline at SLS

PEARL Beamline Enstation
PEARL (X03DA): Photoemission and Atomic Resolution Laboratory

X01DC
IR Beamline (X01DC): Ultra high resolution FTIR

Cristallina-Q Endstation
Cristallina-Q: Quantum Science at SwissFEL

Facilities

XIL Facility at SLS

XIL.jpg

XIL Facility at the SLS

Nanoimprint Lithography

NIL.jpg

Nanoimprint Lithography

Electron Beam Lithography

ebeam.jpg

Electron Beam Lithography
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Paul Scherrer Institut

Forschungsstrasse 111
5232 Villigen PSI
Suisse

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Téléfax: +41 56 310 21 99

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