List of Publications of the LMN

  • Tomizaki T, Shinoda A, Tsujino S
    Single crystal time-lapse measurement using ultrasonic acoustic levitation
    In: Gwo S, Chuang T-H, Lee Y-C, Chainani AA, Chuang Y-C, Wang C-C, et al., eds. PROCEEDINGS OF THE 13TH INTERNATIONAL CONFERENCE ON SYNCHROTRON RADIATION INSTRUMENTATION – SRI2018. Vol. 2054. AIP conference proceedings. American Institute of Physics Inc.; 2019. https://doi.org/10.1063/1.5084703
    DORA PSI
  • Brenner G, Dziarzhytski S, Miedema PS, Rösner B, David C, Beye M
    Normalized single-shot X-ray absorption spectroscopy at a free-electron laser
    Optics Letters. 2019; 44(9): 2157-2160. https://doi.org/10.1364/OL.44.002157
    DORA PSI
  • Jal E, Makita M, Rösner B, David C, Nolting F, Raabe J, et al.
    Single-shot time-resolved magnetic x-ray absorption at a free-electron laser
    Physical Review B. 2019; 99(14): 144305 (9 pp.). https://doi.org/10.1103/PhysRevB.99.144305
    DORA PSI
  • Górzny MŁ, Opara NL, Guzenko VA, Cadarso VJ, Schift H, Li XD, et al.
    Microfabricated silicon chip as lipid membrane sample holder for serial protein crystallography
    Micro and Nano Engineering. 2019; 3: 31-36. https://doi.org/10.1016/j.mne.2019.03.002
    DORA PSI
  • Odstrcil M, Lebugle M, Lachat T, Raabe J, Holler M
    Fast positioning for X-ray scanning microscopy by a combined motion of sample and beam-defining optics
    Journal of Synchrotron Radiation. 2019; 26(2): 504-509. https://doi.org/10.1107/S160057751801785X
    DORA PSI
  • Ahsan A, Mousavi SF, Nijs T, Nowakowska S, Popova O, Wäckerlin A, et al.
    Phase transitions in confinements: controlling solid to fluid transitions of xenon atoms in an on-surface network
    Small. 2019; 15(3): 1803169 (7 pp.). https://doi.org/10.1002/smll.201803169
    DORA PSI
  • Kirchner R, Schift H
    Thermal reflow of polymers for innovative and smart 3D structures: A review
    Materials Science in Semiconductor Processing. 2019; 92: 58-72. https://doi.org/10.1016/j.mssp.2018.07.032
    DORA PSI
  • Horváth B, Křivová B, ho v Olomouci O, Bolat S, Schift H
    Fabrication of Large Area Sub-200 nm Conducting Electrode Arrays by Self-Confinement of Spincoated Metal Nanoparticle Inks
    Advanced Materials Technologies. 2019; 4(3): 1800652. https://doi.org/10.1002/admt.201800652
    DORA PSI
  • Greber T, Seitsonen AP, Hemmi A, Dreiser J, Stania R, Matsui F, et al.
    Circular dichroism and angular deviation in x-ray absorption spectra of Dy2ScN@ C80 single-molecule magnets on h-BN/Rh(111)
    Physical Review Materials. 2019; 3(1): 14409. https://doi.org/10.1103/PhysRevMaterials.3.014409
    DORA PSI
  • Svetina C, Mankowsky R, Knopp G, Koch F, Seniutinas G, Rösner B, et al.
    Towards X-ray transient grating spectroscopy
    Optics Letters. 2019; 44(3): 574-577. https://doi.org/10.1364/OL.44.000574
    DORA PSI
  • Moradi M, Opara NL, Tulli LG, Wäckerlin C, Dalgarno SJ, Teat SJ, et al.
    Supramolecular architectures of molecularly thin yet robust free-standing layers
    Science Advances. 2019; 5(2): eaav4489. https://doi.org/10.1126/sciadv.aav4489
    DORA PSI
  • Rösner B, Dudin P, Bosgra J, Hoesch M, David C
    Zone plates for angle-resolved photoelectron spectroscopy providing sub-micrometre resolution in the extreme ultraviolet regime
    Journal of Synchrotron Radiation. 2019; 26(2): 467-472. https://doi.org/10.1107/S1600577519000869
    DORA PSI
  • Nida S, Tsibizov A, Ziemann T, Woerle J, Moesch A, Schulze-Briese C, et al.
    Silicon carbide X-ray beam position monitors for synchrotron applications
    Journal of Synchrotron Radiation. 2019; 26(1): 28-35. https://doi.org/10.1107/S1600577518014248
    DORA PSI
  • Crha J, Vila-Comamala J, Lehmann E, David C, Trtik P
    Light yield enhancement of 157-gadolinium oxysulfide scintillator screens for the high-resolution neutron imaging
    MethodsX. 2019; 6: 107-114. https://doi.org/10.1016/j.mex.2018.12.005
    DORA PSI
  • Makita M, Vartiainen I, Mohacsi I, Caleman C, Diaz A, Jönsson HO, et al.
    Femtosecond phase-transition in hard x-ray excited bismuth
    Scientific Reports. 2019; 9(1): 602. https://doi.org/10.1038/s41598-018-36216-3
    DORA PSI
  • Gottlieb S, Rösner B, Evangelio L, Fernández-Regúlez M, Nogales A, García-Gutiérrez MC, et al.
    Self-assembly morphology of block copolymers in sub-10 nm topographical guiding patterns
    2019; 4(1): 175-185. https://doi.org/10.1039/c8me00046h
    DORA PSI
  • Kagias M, Wang Z, Guzenko VA, David C, Stampanoni M, Jefimovs K
    Fabrication of Au gratings by seedless electroplating for X-ray grating interferometry
    Materials Science in Semiconductor Processing. 2019; 92: 73-79. https://doi.org/10.1016/j.mssp.2018.04.015
    DORA PSI
  • Ekinci Y, Garvey T, Rivkin L, Streun A, Wrulich A
    A compact high-brightness accelerator-based EUV source for actinic mask inspection
    In: Optics InfoBase Conference Papers. Vol. Part F85-EUVXRAY 2018. OSA - The Optical Society; 2018. https://doi.org/10.1364/EUVXRAY.2018.ET3B.5
    DORA PSI
  • Fernandez S, Kazazis D, Rajeev R, Mochi I, Helfenstein P, Yoshitake S, et al.
    A comparative study of EUV absorber materials using lensless actinic imaging of EUV photomasks
    In: Goldberg KA, ed. Extreme ultraviolet (EUV) lithography IX. Vol. 10583. Proceedings of SPIE - the international society for optical engineering. SPIE; 2018. https://doi.org/10.1117/12.2297381
    DORA PSI
  • Mochi I, Rajeev R, Helfenstein P, Fernandez S, Kazazis D, Ekinci Y
    Through-pellicle inspection of EUV masks
    In: Goldberg KA, ed. Extreme ultraviolet (EUV) lithography IX. Vol. 10583. Proceedings of SPIE - the international society for optical engineering. SPIE; 2018. https://doi.org/10.1117/12.2297436
    DORA PSI
  • Castellanos S, Wu L, Baljozovic M, Portale G, Kazazis D, Vockenhuber M, et al.
    Ti, Zr, and Hf-based molecular hybrid materials as EUV photoresists
    In: Goldberg KA, ed. Extreme ultraviolet (EUV) lithography IX. Vol. 10583. Proceedings of SPIE - the international society for optical engineering. SPIE; 2018. https://doi.org/10.1117/12.2297167
    DORA PSI
  • Manouras T, Kazazis D, Koufakis E, Ekinci Y, Vamvakaki M, Argitis P
    Ultra-sensitive EUV resists based on acid-catalyzed polymer backbone breaking
    In: Goldberg KA, ed. Extreme ultraviolet (EUV) lithography IX. Vol. 10583. Proceedings of SPIE - the international society for optical engineering. SPIE; 2018. https://doi.org/10.1117/12.2299853
    DORA PSI
  • Wang X, Tseng L-T, Kazazis D, Tasdemir Z, Vockenhuber M, Mochi I, et al.
    Studying resist performance for contact holes printing using EUV interference lithography
    In: Naulleau PP, Gargini PA, Itani T, Hendrickx E, Ronse KG, eds. International conference on extreme ultraviolet lithography 2018. Vol. 10809. Proceedings of SPIE - the international society for optical engineering. SPIE; 2018. https://doi.org/10.1117/12.2501949
    DORA PSI
  • Rajeev R, Mochi I, Kazazis D, Fernandez S, Li-Teng T, Helfenstein P, et al.
    Phase defect inspection on EUV masks using RESCAN
    In: Naulleau PP, Gargini PA, Itani T, Hendrickx E, Ronse KG, eds. International conference on extreme ultraviolet lithography 2018. Vol. 10809. Proceedings of SPIE - the international society for optical engineering. SPIE; 2018. https://doi.org/10.1117/12.2502726
    DORA PSI
  • Tasdemir Z, Vockenhuber M, Mochi I, Olvera KG, Meeuwissen M, Yildirim O, et al.
    Chemically amplified EUV resists approaching 11nm half-pitch
    In: Goldberg KA, ed. Extreme ultraviolet (EUV) lithography IX. Vol. 10583. Proceedings of SPIE - the international society for optical engineering. SPIE; 2018. https://doi.org/10.1117/12.2299643
    DORA PSI
  • Krempaský J, Koch F, Vagovič P, Mikeš L, Jaggi A, Svetina C, et al.
    Inspecting adaptive optics with at-wavelength wavefront metrology
    In: Spiga D, Mimura H, Spiga D, eds. Adaptive X-Ray Optics V. Vol. 10761. Proceedings of SPIE - the international society for optical engineering. SPIE; 2018. https://doi.org/10.1117/12.2320532
    DORA PSI
  • Ekinci Y, Kazazis D, Roth J, McClelland A, Popescu C, Robinson A
    Progress in multi-trigger resists for EUV lithography (Conference Presentation)
    In: International conference on extreme ultraviolet lithography 2018. ; 2018. https://doi.org/10.1117/12.2501811
    DORA PSI
  • Rantala J, Gädda T, Laukkanen M, Dang LN, Karaste K, Kazizis D, et al.
    New resist and underlayer approaches toward EUV lithography
    In: Naulleau PP, Gargini PA, Itani T, Hendrickx E, Ronse KG, eds. International conference on extreme ultraviolet lithography 2018. Vol. 10809. Proceedings of SPIE - the international society for optical engineering. SPIE; 2018. https://doi.org/10.1117/12.2503107
    DORA PSI
  • Dejkameh A, Erdmann A, Evanschitzky P, Ekinci Y
    Fourier ptychography for lithography high NA systems
    In: Smith DG, Wyrowski F, Erdmann A, eds. Computational Optics II. Vol. 10694. Proceedings of SPIE - the international society for optical engineering. SPIE; 2018. https://doi.org/10.1117/12.2311332
    DORA PSI
  • Tasdemir Z, Wang X, Mochi I, Van Lent-Protasova L, Meeuwissen M, Custers R, et al.
    Evaluation of EUV resists for 5 nm technology node and beyond
    In: Naulleau PP, Gargini PA, Itani T, Hendrickx E, Ronse KG, eds. International conference on extreme ultraviolet lithography 2018. Vol. 10809. Proceedings of SPIE - the international society for optical engineering. SPIE; 2018. https://doi.org/10.1117/12.2502688
    DORA PSI
  • Popescu C, Kazazis D, McClelland A, Dawson G, Roth J, Theis W, et al.
    High-resolution EUV lithography using a multi-trigger resist
    In: Goldberg KA, ed. Extreme ultraviolet (EUV) lithography IX. Vol. 10583. Proceedings of SPIE - the international society for optical engineering. SPIE; 2018. https://doi.org/10.1117/12.2297406
    DORA PSI
  • Popescu C, McClelland A, Kazazis D, Dawson G, Roth J, Ekinci Y, et al.
    Multi-trigger resist for electron beam and extreme ultraviolet lithography
    In: Behringer UFW, Finders J, eds. 34th European Mask and Lithography Conference. Vol. 10775. Proceedings of SPIE - the international society for optical engineering. SPIE; 2018. https://doi.org/10.1117/12.2316628
    DORA PSI
  • Ekinci Y, Garvey T, Streun A, Wrulich A, Rivkin L
    A high-brightness accelerator-based EUV source for metrology applications
    In: Gallagher EE, Rankin JH, eds. Photomask Technology 2018. Vol. 10810. Proceedings of SPIE - the international society for optical engineering. SPIE; 2018. https://doi.org/10.1117/12.2501930
    DORA PSI
  • Mochi I, Timmermans M, Gallagher E, Mariano Juste M, Pollentier I, Rajeev R, et al.
    Experimental evaluation of the impact of EUV pellicles on reticle imaging
    In: Gallagher EE, Rankin JH, eds. Photomask Technology 2018. Vol. 10810. Proceedings of SPIE - the international society for optical engineering. SPIE; 2018. https://doi.org/10.1117/12.2502480
    DORA PSI
  • Matmon G, Ginossar E, Villis BJ, Kölker A, Lim T, Solanki H, et al.
    Two- to three-dimensional crossover in a dense electron liquid in silicon
    Physical Review B. 2018; 97: 155306 (8 pp.). https://doi.org/10.1103/PhysRevB.97.155306
    DORA PSI
  • Chikina A, Lechermann F, Husanu M-A, Caputo M, Cancellieri C, Wang X, et al.
    Orbital ordering of the mobile and localized electrons at oxygen-deficient LaAlO3/SrTiO3 interfaces
    ACS Nano. 2018; 12(8): 7927-7935. https://doi.org/10.1021/acsnano.8b02335
    DORA PSI
  • Fallica R, Haitjema J, Wu L, Castellanos S, Brouwer AM, Ekinci Y
    Absorption coefficient of metal-containing photoresists in the extreme ultraviolet
    2018. https://doi.org/10.1117/1.JMM.17.2.023505
    DORA PSI
  • Rau C, Shi X, Zdora M, Zanette I, David C
    Multi-Scale Imaging at the Coherence and Imaging Beamline I13 at Diamond
    Microscopy and Microanalysis. 2018; 24: 256. https://doi.org/10.1017/S1431927618013624
    DORA PSI
  • Choi J, Ivashko O, Dennler N, Aoki D, Von Arx K, Gerber S, et al.
    Pressure-induced rotational symmetry breaking in URu2Si2
    Physical Review B. 2018; 98(24): 241113. https://doi.org/10.1103/PhysRevB.98.241113
    DORA PSI
  • Vila-Comamala J, Romano L, Guzenko V, Kagias M, Stampanoni M, Jefimovs K
    Towards sub-micrometer high aspect ratio X-ray gratings by atomic layer deposition of iridium
    Microelectronic Engineering. 2018; 192: 19-24. https://doi.org/10.1016/j.mee.2018.01.027
    DORA PSI
  • Villanueva-Perez P, Pedrini B, Mokso R, Vagovic P, Guzenko VA, Leake SJ, et al.
    Hard x-ray multi-projection imaging for single-shot approaches
    Optica. 2018; 5(12): 1521-1524. https://doi.org/10.1364/OPTICA.5.001521
    DORA PSI
  • Bray K, Regan B, Trycz A, Previdi R, Seniutinas G, Ganesan K, et al.
    Single Crystal Diamond Membranes and Photonic Resonators Containing Germanium Vacancy Color Centers
    ACS Photonics. 2018; 5(12): 4817-4822. https://doi.org/10.1021/acsphotonics.8b00930
    DORA PSI
  • Fallica R, Ekinci Y
    Photoacid generator-polymer interaction on the quantum yield of chemically amplified resists for extreme ultraviolet lithography
    Journal of Materials Chemistry C. 2018; 6(27): 7267-7273. https://doi.org/10.1039/c8tc01446a
    DORA PSI
  • Gottlieb S, Kazazis D, Mochi I, Evangelio L, Fernández-Regúlez M, Ekinci Y, et al.
    Nano-confinement of block copolymers in high accuracy topographical guiding patterns: modelling the emergence of defectivity due to incommensurability
    Soft Matter. 2018; 14(33): 6799-6808. https://doi.org/10.1039/c8sm01045e
    DORA PSI
  • Kazazis D, Tseng L-T, Ekinci Y
    Improving the resolution and throughput of achromatic Talbot lithography
    Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 2018; 36(6): 06J501. https://doi.org/10.1116/1.5048506
    DORA PSI
  • Chen X, Tao Z, Chen C, Wang C, Wang L, Jiang H, et al.
    All-dielectric metasurface-based roll-angle sensor
    Sensors and Actuators A: Physical. 2018; 279: 509-517. https://doi.org/10.1016/j.sna.2018.06.058
    DORA PSI
  • Gerspach MA, Mojarad N, Sharma D, Ekinci Y, Pfohl T
    Pneumatically Controlled Nanofluidic Devices for Contact-Free Trapping and Manipulation of Nanoparticles
    Particle and Particle Systems Characterization. 2018; 35(12): 1800161. https://doi.org/10.1002/ppsc.201800161
    DORA PSI
  • Bergamaschi A, Andrä M, Barten R, Borca C, Brückner M, Chiriotti S, et al.
    The MÖNCH detector for soft X-ray, high-resolution, and energy resolved applications
    Synchrotron Radiat. News. 2018:11-15.
    DORA PSI
  • Usachov DY, Tarasov AV, Bokai KA, Shevelev VO, Vilkov OY, Petukhov AE, et al.
    Site- and spin-dependent coupling at the highly ordered h -BN/Co(0001) interface
    Physical Review B. 2018; 98(19): 195438. https://doi.org/10.1103/PhysRevB.98.195438
    DORA PSI
  • Lebugle M, Dworkowski F, Pauluhn A, Guzenko VA, Romano L, Meier N, et al.
    High-intensity x-ray microbeam for macromolecular crystallography using silicon kinoform diffractive lenses
    Applied Optics. 2018; 57(30): 9032-9039. https://doi.org/10.1364/AO.57.009032
    DORA PSI
  • Do A, Briat M, Chaleil A, Rubbelynck C, Lebugle M, David C, et al.
    Characterization of a two-channel, high resolution hard x-ray microscope using Fresnel zone plates for laser-plasma interaction experiments
    Review of Scientific Instruments. 2018; 89(10): 10G122. https://doi.org/10.1063/1.5039326
    DORA PSI
  • Ferrari E, Ischebeck R, Bednarzik M, Bettoni S, Borrelli S, Braun H-H, et al.
    The ACHIP experimental chambers at the Paul Scherrer Institut
    Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment. 2018; 907: 244-247. https://doi.org/10.1016/j.nima.2018.02.112
    DORA PSI
  • Bergamaschi A, David C, Dinapoli R, Greiffenberg D, Lebugle M, Mezza D, et al.
    Hybrid Detectors for High Resolution Imaging.
    Microscopy and Microanalysis. 2018; 24: 320. https://doi.org/10.1017/S1431927618013910
    DORA PSI
  • Koch F, Yurgens V, Giorgetta J, Menneglier C, Bourgoin C, Moreno T, et al.
    Toward Hard X-ray Transmission Microscopy at the ANATOMIX Beamline of Synchrotron SOLEIL
    Microscopy and Microanalysis. 2018; 24: 248. https://doi.org/10.1017/S1431927618013582
    DORA PSI
  • Lottermoser L, David C, Beckmann F
    Full-Field Hard X-Ray Microscope Designed for Materials Science Applications
    Microscopy and Microanalysis. 2018; 24: 228. https://doi.org/10.1017/S143192761801348X
    DORA PSI
  • Kuppili VSC, David C, Rau C
    The Diamond I13-2 Transmission X-ray Microscope: Current Status and Future Developments
    Microscopy and Microanalysis. 2018; 24: 218. https://doi.org/10.1017/S1431927618013430
    DORA PSI
  • Schropp A, Falkenberg G, Garrevoet J, David C
    Scanning Hard X-Ray Microscopy Based on Be CRLs
    Microscopy and Microanalysis. 2018; 24: 188. https://doi.org/10.1017/S1431927618013284
    DORA PSI
  • Pedrini B, Mokso R, Vagovic P, Guzenko V, David C, Stampanoni M
    Coherent Hard X-ray Multiprojection Imaging
    Microscopy and Microanalysis. 2018; 24: 52. https://doi.org/10.1017/S1431927618012680
    DORA PSI
  • Stania R, Seitsonen AP, Kunhardt D, Büchner B, Popov AA, Muntwiler M, et al.
    Electrostatic interaction across a single-layer carbon shell
    Journal of Physical Chemistry Letters. 2018; 9(13): 3586-3590. https://doi.org/10.1021/acs.jpclett.8b01326
    DORA PSI
  • Matsui F, Nishikawa H, Daimon H, Muntwiler M, Takizawa M, Namba H, et al.
    The 4π kz periodicity in photoemission from graphite
    Physical Review B. 2018; 97(4): 45430. https://doi.org/10.1103/PhysRevB.97.045430
    DORA PSI
  • Suszka AK, Gliga S, Warnicke P, Wintz S, Saha S, Charipar KM, et al.
    Observation of the out-of-plane magnetization in a mesoscopic ferromagnetic structure superjacent to a superconductor
    Applied Physics Letters. 2018; 113(16): 162601. https://doi.org/10.1063/1.5051653
    DORA PSI
  • Nijs T, Klein YM, Mousavi SF, Ahsan A, Nowakowska S, Constable EC, et al.
    The Different Faces of 4′-Pyrimidinyl-Functionalized 4,2′:6′,4′′-Terpyridines: Metal-Organic Assemblies from Solution and on Au(111) and Cu(111) Surface Platforms
    Journal of the American Chemical Society. 2018; 140(8): 2933-2939. https://doi.org/10.1021/jacs.7b12624
    DORA PSI
  • Nowakowska S, Mazzola F, Alberti MN, Song F, Voigt T, Nowakowski J, et al.
    Adsorbate-induced modification of the confining barriers in a quantum box array
    ACS Nano. 2018; 12(1): 768-778. https://doi.org/10.1021/acsnano.7b07989
    DORA PSI
  • Müller V, Hinaut A, Moradi M, Baljozovic M, Jung TA, Shahgaldian P, et al.
    A Two-Dimensional Polymer Synthesized at the Air/Water Interface
    Angewandte Chemie International Edition. 2018; 57(33): 10584-10588. https://doi.org/10.1002/anie.201804937
    DORA PSI
  • Lazarević-Pašti T, Anićijević V, Baljozović M, Vasić Anićijević D, Gutić S, Vasić V, et al.
    The impact of the structure of graphene-based materials on the removal of organophosphorus pesticides from water
    Environmental Science: Nano. 2018; 5(6): 1482-1494. https://doi.org/10.1039/c8en00171e
    DORA PSI
  • Zhang Y, Haitjema J, Baljozovic M, Vockenhuber M, Kazazis D, Jung TA, et al.
    Dual-tone application of a tin-oxo cage photoresist under e-beam and EUV exposure
    Journal of Photopolymer Science and Technology. 2018; 31(2): 249-255. https://doi.org/10.2494/photopolymer.31.249
    DORA PSI
  • Janssen R, David C, Beckmann F
    Nanotomography of Inverse Photonic Crystals Using Zernike Phase Contrast
    Microscopy and Microanalysis. 2018; 24: 148. https://doi.org/10.1017/S1431927618013120
    DORA PSI
  • Heenan TMM, Robinson JB, Lu X, Tjaden B, Cervellino A, Bailey JJ, et al.
    Understanding the thermo-mechanical behaviour of solid oxide fuel cell anodes using synchrotron X-ray diffraction
    Solid State Ionics. 2018; 314: 156-164. https://doi.org/10.1016/j.ssi.2017.10.025
    DORA PSI
  • Fallica R, Watts B, Rösner B, Della Giustina G, Brigo L, Brusatin G, et al.
    Changes in the near edge x-ray absorption fine structure of hybrid organic-inorganic resists upon exposure
    Nanotechnology. 2018; 29(36): 36LT03. https://doi.org/10.1088/1361-6528/aaccd4
    DORA PSI
  • Fink RH, Rösner B, Du X, Späth A, Johnson M, Hawly T, et al.
    In-operando soft X-ray microspectroscopy of organic electronics devices
    Microscopy and Microanalysis. 2018; 24(Suppl. 2): 424-425. https://doi.org/10.1017/S143192761801437X
    DORA PSI
  • Rösner B, Gauthier D, Döring F, David C
    Extreme-Ultraviolet Vortices at a Free-Electron Laser
    Microscopy and Microanalysis. 2018; 24: 296. https://doi.org/10.1017/S1431927618013806
    DORA PSI
  • Rösner B, Koch F, Döring F, Guzenko V, Meyer M, Späth A, et al.
    7 nm Spatial Resolution in Soft X-ray Microscopy
    Microscopy and Microanalysis. 2018; 24: 272. https://doi.org/10.1017/S1431927618013697
    DORA PSI
  • Döring F, Marschall F, Yin Z, Rösner B, Beye M, Kubicek K, et al.
    1D-Full Field Microscopy of Elastic and Inelastic Scattering with Transmission off-axis Fresnel Zone Plates
    Microscopy and Microanalysis. 2018; 24: 184. https://doi.org/10.1017/S1431927618013260
    DORA PSI
  • David C, Rösner B, Döring F, Guzenko V, Koch F, Lebugle M, et al.
    Diffractive X-ray optics for synchrotrons and free-electron lasers
    Microscopy and Microanalysis. 2018; 24: 264-267. https://doi.org/10.1017/S1431927618013673
    DORA PSI
  • Helfenstein P, Rajeev R, Mochi I, Kleibert A, Vaz CAF, Ekinci Y
    Beam drift and partial probe coherence effects in EUV reflective-mode coherent diffractive imaging
    Optics Express. 2018; 26(9): 12242-12256. https://doi.org/10.1364/OE.26.012242
    DORA PSI
  • Tsujino S
    Transverse structure of the wave function of field emission electron beam determined by intrinsic transverse energy
    Journal of Applied Physics. 2018; 124(4): 044304 (12 pp.). https://doi.org/10.1063/1.5035284
    DORA PSI
  • Lee C, Tsujino S, Miller RJD
    Transmission low-energy electron diffraction using double-gated single nanotip field emitter
    Applied Physics Letters. 2018; 113(1): 013505 (4 pp.). https://doi.org/10.1063/1.5030889
    DORA PSI
  • Finizio S, Wintz S, Gliga S, Kirk E, Suszka AK, Wohlhüter P, et al.
    Unexpected field-induced dynamics in magnetostrictive microstructured elements under isotropic strain
    Journal of Physics: Condensed Matter. 2018; 30(31): 314001. https://doi.org/10.1088/1361-648X/aacddd
    DORA PSI
  • Olbinado MP, Grenzer J, Pradel P, De Resseguier T, Vagovic P, Zdora M-C, et al.
    Advances in indirect detector systems for ultra high-speed hard X-ray imaging with synchrotron light
    Journal of Instrumentation. 2018; 13(4): C04004 (8 pp.). https://doi.org/10.1088/1748-0221/13/04/C04004
    DORA PSI
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    Parallel and antiparallel angular momentum transfer of circularly polarized light to photoelectrons and Auger electrons at the Ni L3 absorption threshold
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    Diamond: a gem for micro-optics
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    Design considerations of a hollow microneedle-optofluidic biosensing platform incorporating enzyme-linked assays
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  • Kirchner R, Chidambaram N, Schift H
    Benchmarking surface selective vacuum ultraviolet and thermal postprocessing of thermoplastics for ultrasmooth 3-D-printed micro-optics
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  • Camarda M, Woerle J, Souliere V, Ferrogabriel G, Sigg H, Grossner U, et al.
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  • Popescu C, Frommhold A, McClelland A, Roth J, Ekinci Y, Robinson APG
    Sensitivity enhancement of the high-resolution xMT multi-trigger resist for EUV lithography
    Presented at: Extreme ultraviolet (EUV) lithography VIII 2017; February 25 - March 2, 2017. https://doi.org/10.1117/12.2258098
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  • Hotalen J, Murphy M, Earley W, Vockenhuber M, Ekinci Y, Freedman DA, et al.
    Advanced development techniques for metal-based EUV resists
    Presented at: Extreme ultraviolet (EUV) lithography VIII 2017; February 25 - March 2, 2017. https://doi.org/10.1117/12.2258126
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  • Mochi I, Helfenstein P, Mohacsi I, Rajendran R, Yoshitake S, Ekinci Y
    RESCAN: An actinic lensless microscope for defect inspection of EUV reticles
    Presented at: Extreme ultraviolet (EUV) lithography VIII 2017; February 25 - March 2, 2017. https://doi.org/10.1117/12.2258086
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  • Ekinci Y
    Non-destructive dimensional metrology of EUV resist gratings
    In: Metrology, inspection, and process control for microlithography XXXI. Vol. 10145. SPIE ADVANCED LITHOGRAPHY. ; 2017. https://doi.org/10.1117/12.2257690
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  • Kirchner R, Chidambaram N, Altana M, Schift H
    How post-processing by selective thermal reflow can reduce the roughness of 3D lithography in micro-optical lenses
    Presented at: Laser 3D Manufacturing IV 2017; January 30 - February 2, 2017. https://doi.org/10.1117/12.2258090
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  • Helfenstein P, Mochi I, Rajendran R, Yoshitake S, Ekinci Y
    A two-step method for fast and reliable EUV mask metrology
    Presented at: Extreme ultraviolet (EUV) lithography VIII 2017; February 25 - March 2, 2017. https://doi.org/10.1117/12.2259961
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    State-of-the-art EUV materials and processes for the 7nm node and beyond
    Presented at: Extreme ultraviolet (EUV) lithography VIII 2017; February 25 - March 2, 2017. https://doi.org/10.1117/12.2260153
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  • Fallica R, Watts B, Della Giustina G, Brigo L, Brusatin G, Ekinci Y
    Chemical changes in hybrid photoresists before and after exposure by in situ NEXAFS analysis
    Presented at: Advances in patterning materials and processes XXXIV 2017; February 25 - March 2, 2017. https://doi.org/10.1117/12.2258215
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    Improvements in resist performance towards EUV HVM
    Presented at: Extreme ultraviolet (EUV) lithography VIII 2017; February 25 - March 2, 2017. https://doi.org/10.1117/12.2257415
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    Contrast matching of line gratings obtained with NXE3XXX and EUV- interference lithography
    Presented at: International conference on Extreme Ultraviolet Lithography 2017; September 11-14, 2016. https://doi.org/10.1117/12.2280541
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    Multi-trigger resist for electron beam lithography
    Presented at: 33rd European Mask and Lithography conference, EMLC 2017; June 26-28, 2017. https://doi.org/10.1117/12.2279767
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    Actinic inspection of EUV reticles with arbitrary pattern design
    Presented at: International conference on Extreme Ultraviolet Lithography 2017; September 11-14, 2016. https://doi.org/10.1117/12.2280528
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  • Schift H, Chidambaram N, Altana M, Kirchner R
    Selective surface smoothening of 3D micro-optical elements
    Presented at: Emerging Patterning Technologies 2017; February 25 - March 2, 2017. https://doi.org/10.1117/12.2256358
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  • Haitjema J, Zhang Y, Vockenhuber M, Kazazis D, Ekinci Y, Brouwer AM
    Extreme ultraviolet patterning of tin-oxo cages
    Presented at: Extreme ultraviolet (EUV) lithography VIII 2017; February 25 - March 2, 2017. https://doi.org/10.1117/12.2257911
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    Photosensitized Chemically Amplified Resist (PSCAR) 2.0 for high-Throughput and high-resolution EUV lithography: Dual photosensitization of acid generation and quencher decomposition by flood exposure
    Presented at: Advances in patterning materials and processes XXXIV 2017; February 25 - March 2, 2017. https://doi.org/10.1117/12.2258217
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  • Fallica R, Haitjema J, Wu L, Castellanos S, Brouwer F, Ekinci Y
    Absorption coefficient and exposure kinetics of photoresists at EUV
    Presented at: Extreme ultraviolet (EUV) lithography VIII 2017; February 25 - March 2, 2017. https://doi.org/10.1117/12.2257240
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  • Rösner B, Schmidt U, Fink RH
    In-operando studies of Ag-TCNQ nanocrystals using Raman and soft x-ray microspectroscopy
    Presented at: 13th international X-ray microscopy conference, XRM 2016; August 15-19, 2016. https://doi.org/10.1088/1742-6596/849/1/012016
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    Nanotomography endstation at the P05 beamline: Status and perspectives
    Presented at: 13th international X-ray microscopy conference, XRM 2016; August 15-19, 2016. https://doi.org/10.1088/1742-6596/849/1/012056
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  • Rajendran R, Mochi I, Helfenstein P, Mohacsi I, Redford S, Mozzanica A, et al.
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    Nature. 2017; 541(7635): 68-71. https://doi.org/10.1038/nature20782
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    Analysis of 4H-SiC MOS Capacitors on macro-stepped surfaces
    Materials Science Forum. 2017; 897 MSF: 107-110. https://doi.org/10.4028/www.scientific.net/MSF.897.107
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  • Privitera SMS, Litrico G, Camarda M, Piluso N, La Via F
    Electrical properties of extended defects in 4H-SiC investigated by photoinduced current measurements
    Applied Physics Express. 2017; 10(3): 36601. https://doi.org/10.7567/APEX.10.036601
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    Journal of Physics and Chemistry of Solids. 2017: S0022369717314531. https://doi.org/10.1016/j.jpcs.2017.11.010
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    AIP Advances. 2017; 7(5): 56001. https://doi.org/10.1063/1.4973295
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    Tunable magnetic vortex resonance in a potential well
    Physical Review B. 2017; 96(17): 174402. https://doi.org/10.1103/PhysRevB.96.174402
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    Molecular Chessboard Assemblies Sorted by Site-Specific Interactions of Out-of-Plane d-Orbitals with a Semimetal Template
    Nano Letters. 2017; 17(3): 1956-1962. https://doi.org/10.1021/acs.nanolett.6b05344
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    Adjustable sidewall slopes by electron-beam exposure layout
    Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 2017; 35(6): 06G501. https://doi.org/10.1116/1.4993724
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  • Romano L, Vila-Comamala J, Schift H, Stampanoni M, Jefimovs K
    Hot embossing of Au- and Pb-based alloys for x-ray grating fabrication
    Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 2017; 35(6): 06G302. https://doi.org/10.1116/1.4991807
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  • Fallica R, Kazazis D, Kirchner R, Voigt A, Mochi I, Schift H, et al.
    Lithographic performance of ZEP520A and mr-PosEBR resists exposed by electron beam and extreme ultraviolet lithography
    Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 2017; 35(6): 61603. https://doi.org/10.1116/1.5003476
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    High resolution beam profiling of X-ray free electron laser radiation by polymer imprint development
    Optics Express. 2017; 25(24): 30686-30695. https://doi.org/10.1364/OE.25.030686
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    Fabrication of diamond diffraction gratings for experiments with intense hard x-rays
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    Systematic efficiency study of line-doubled zone plates
    Microelectronic Engineering. 2017; 177: 25-29. https://doi.org/10.1016/j.mee.2017.01.017
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    High-speed fixed-target serial virus crystallography
    Nature Methods. 2017; 14(8): 805-810. https://doi.org/10.1038/nmeth.4335
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    Tunable kinoform x-ray beam splitter
    Optics Letters. 2017; 42(21): 4327-4330. https://doi.org/10.1364/OL.42.004327
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    Emergent dynamic chirality in a thermally driven artificial spin ratchet
    Nature Materials. 2017; 16(11): 1106-1112. https://doi.org/10.1038/NMAT5007
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    Intrinsic and spatially nonuniform ferromagnetism in Co-doped ZnO films
    Physical Review B. 2017; 96(10): 104423. https://doi.org/10.1103/PhysRevB.96.104423
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  • Müller V, Shao F, Baljozovic M, Moradi M, Zhang Y, Jung T, et al.
    Structural Characterization of a Covalent Monolayer Sheet Obtained by Two-Dimensional Polymerization at an Air/Water Interface
    Angewandte Chemie International Edition. 2017; 56(48): 15262-15266. https://doi.org/10.1002/anie.201707140
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  • Finizio S, Wintz S, Kirk E, Suszka AK, Gliga S, Wohlhüter P, et al.
    Control of the gyration dynamics of magnetic vortices by the magnetoelastic effect
    Physical Review B. 2017; 96(5): 54438. https://doi.org/10.1103/PhysRevB.96.054438
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  • Lebugle M, Liebi M, Wakonig K, Guzenko VA, Holler M, Menzel A, et al.
    High-acceptance versatile microfocus module based on elliptical Fresnel zone plates for small-angle X-ray scattering
    Optics Express. 2017; 25(18): 21145-21158. https://doi.org/10.1364/OE.25.021145
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  • Farhan A, Derlet PM, Anghinolfi L, Kleibert A, Heyderman LJ
    Magnetic charge and moment dynamics in artificial kagome spin ice
    Physical Review B. 2017; 96(6): 64409. https://doi.org/10.1103/PhysRevB.96.064409
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  • Spreafico C, Karim W, Ekinci Y, Van Bokhoven JA, VandeVondele J
    Hydrogen Adsorption on Nanosized Platinum and Dynamics of Spillover onto Alumina and Titania
    Journal of Physical Chemistry C. 2017; 121(33): 17862-17872. https://doi.org/10.1021/acs.jpcc.7b03733
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  • Marschall F, McNally D, Guzenko VA, Rösner B, Dantz M, Lu X, et al.
    Zone plates as imaging analyzers for resonant inelastic x-ray scattering
    Optics Express. 2017; 25(14): 15624-15634. https://doi.org/10.1364/OE.25.015624
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  • Bingham NS, Suszka AK, Vaz CAF, Kim H, Heyderman LJ
    Interfacial room temperature magnetism and enhanced magnetocaloric effect in strained La0.66Ca0.34MnO3/BaTiO3 heterostructures
    Physical Review B. 2017; 96(2): 24419. https://doi.org/10.1103/PhysRevB.96.024419
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  • Wang X-Y, Dienel T, Di Giovannantonio M, Borin Barin G, Kharche N, Deniz O, et al.
    Heteroatom-Doped Perihexacene from a Double Helicene Precursor: On-Surface Synthesis and Properties
    Journal of the American Chemical Society. 2017; 139(13): 4671-4674. https://doi.org/10.1021/jacs.7b02258
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  • Gerber S, Yang S-L, Zhu D, Soifer H, Sobota JA, Rebec S, et al.
    Femtosecond electron-phonon lock-in by photoemission and x-ray free-electron laser
    Science. 2017; 357(6346): 71-75. https://doi.org/10.1126/science.aak9946
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  • Windsor YW, Piamonteze C, Ramakrishnan M, Scaramucci A, Rettig L, Huever JA, et al.
    Magnetic properties of strained multiferroic CoC r2 O4: A soft x-ray study
    Physical Review B. 2017; 95(22): 224413. https://doi.org/10.1103/PhysRevB.95.224413
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  • Fallica R, Kirchner R, Schift H, Ekinci Y
    High-resolution grayscale patterning using extreme ultraviolet interference lithography
    Microelectronic Engineering. 2017; 177: 1-5. https://doi.org/10.1016/j.mee.2017.01.007
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  • Virganavičius D, Juodėnas M, Tamulevičius T, Schift H, Tamulevičius S
    Investigation of transient dynamics of capillary assisted particle assembly yield
    Applied Surface Science. 2017; 406: 136-143. https://doi.org/10.1016/j.apsusc.2017.02.100
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  • Chidambaram N, Kirchner R, Fallica R, Yu L, Altana M, Schift H
    Selective Surface Smoothening of Polymer Microlenses by Depth Confined Softening
    Advanced Materials Technologies. 2017; 2(5): 20161038. https://doi.org/10.1002/admt.201700018
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  • Opara N, Martiel I, Arnold SA, Braun T, Stahlberg H, Makita M, et al.
    Direct protein crystallization on ultrathin membranes for diffraction measurements at X-ray free-electron lasers
    Journal of Applied Crystallography. 2017; 50(3): 909-918. https://doi.org/10.1107/S1600576717005799
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  • Jöhr R, Hinaut A, Pawlak R, Ząjac Ł, Olszowski P, Such B, et al.
    Thermally induced anchoring of a zinc-carboxyphenylporphyrin on rutile TiO2 (110)
    Journal of Chemical Physics. 2017; 146(18): 184704 (6 pp.). https://doi.org/10.1063/1.4982936
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  • Haase J, Bagiante S, Sigg H, van Bokhoven JA
    Surface enhanced infrared absorption of chemisorbed carbon monoxide using plasmonic nanoantennas
    Optics Letters. 2017; 42(10): 1931-1934. https://doi.org/10.1364/OL.42.001931
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  • Woerle J, Camarda M, Schneider CW, Sigg H, Grossner U, Gobrecht J
    Analysis of thin thermal oxides on (0001) sic epitaxial layers
    Materials Science Forum. 2017; 897 MSF: 119-122. https://doi.org/10.4028/www.scientific.net/MSF.897.119
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  • Müller V, Hungerland T, Baljozovic M, Jung T, Spencer ND, Eghlidi H, et al.
    Ink-Free Reversible Optical Writing in Monolayers by Polymerization of a Trifunctional Monomer: Toward Rewritable “Molecular Paper”
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  • Karim W, Tschupp SA, Herranz J, Schmidt TJ, Ekinci Y, van Bokhoven JA
    State-of-the-art nanofabrication in catalysis
    Chimia. 2017; 71(4): 160-169. https://doi.org/10.2533/chimia.2017.160
    DORA PSI
  • Shimamoto K, Mukherjee S, Bingham NS, Suszka AK, Lippert T, Niedermayer C, et al.
    Single-axis-dependent structural and multiferroic properties of orthorhombic RMn O3(R=Gd-Lu)
    Physical Review B. 2017; 95(18): 184105. https://doi.org/10.1103/PhysRevB.95.184105
    DORA PSI
  • Dübner M, Cadarso VJ, Gevrek TN, Sanyal A, Spencer ND, Padeste C
    Reversible Light-Switching of Enzymatic Activity on Orthogonally Functionalized Polymer Brushes
    ACS Applied Materials and Interfaces. 2017; 9(11): 9245-9249. https://doi.org/10.1021/acsami.7b01154
    DORA PSI
  • Woerle J, Bisti F, Husanu MA, Strocov VN, Schneider CW, Sigg H, et al.
    Electronic band structure of the buried SiO2/SiC interface investigated by soft x-ray ARPES
    Applied Physics Letters. 2017; 110(13): 132101. https://doi.org/10.1063/1.4979102
    DORA PSI
  • Monshipouri M, Abdi Y, Darbari S, Tsujino S
    Multiphoton photoemission of gold nanopillars fabricated by carbon nanotube templates
    Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 2017; 35(2): 02C110. https://doi.org/10.1116/1.4978655
    DORA PSI
  • Zabel T, Geiger R, Marin E, Müller E, Diaz A, Bonzon C, et al.
    Top-down method to introduce ultra-high elastic strain
    Journal of Materials Research. 2017; 32(4): 726-736. https://doi.org/10.1557/jmr.2017.31
    DORA PSI
  • Mohacsi I, Vartiainen I, Rösner B, Guizar-Sicairos M, McNulty I, David C
    Interlaced zone plate optics for hard X-ray imaging in the 10 nm range
    Scientific Reports. 2017; 7: 43624. https://doi.org/10.1038/srep43624
    DORA PSI
  • Romano L, Vila-Comamala J, Kagias M, Vogelsang K, Schift H, Stampanoni M, et al.
    High aspect ratio metal microcasting by hot embossing for X-ray optics fabrication
    Microelectronic Engineering. 2017; 176: 6-10. https://doi.org/10.1016/j.mee.2016.12.032
    DORA PSI
  • Külah E, Marot L, Steiner R, Romanyuk A, Jung TA, Wäckerlin A, et al.
    Surface chemistry of rare-earth oxide surfaces at ambient conditions: Reactions with water and hydrocarbons
    Scientific Reports. 2017; 7: 43369. https://doi.org/10.1038/srep43369
    DORA PSI
  • Ribič PR, Rösner B, Gauthier D, Allaria E, Döring F, Foglia L, et al.
    Extreme-ultraviolet vortices from a free-electron laser
    Physical Review X. 2017; 7(3): 31036. https://doi.org/10.1103/PhysRevX.7.031036
    DORA PSI
  • Pedrini B, Menzel A, Guzenko VA, David C, Abela R, Gutt C
    Model-independent particle species disentanglement by X-ray cross-correlation scattering
    Scientific Reports. 2017; 7: 45618. https://doi.org/10.1038/srep45618
    DORA PSI
  • Seniutinas G, Balčytis A, Reklaitis I, Chen F, Davis J, David C, et al.
    Tipping solutions: Emerging 3D nano-fabrication/-imaging technologies
    Nanophotonics. 2017; 6(5): 923-941. https://doi.org/10.1515/nanoph-2017-0008
    DORA PSI
  • Marschall F, Yin Z, Rehanek J, Beye M, Döring F, Kubiček K, et al.
    Transmission zone plates as analyzers for efficient parallel 2D RIXS-mapping
    Scientific Reports. 2017; 7(1): 8849. https://doi.org/10.1038/s41598-017-09052-0
    DORA PSI
  • Zdora M-C, Vila-Comamala J, Schulz G, Khimchenko A, Hipp A, Cook AC, et al.
    X-ray phase microtomography with a single grating for high-throughput investigations of biological tissue
    Biomedical Optics Express. 2017; 8(2): 1257-1270. https://doi.org/10.1364/BOE.8.001257
    DORA PSI
  • Krieger JA, Chang C-Z, Husanu MA, Sostina D, Ernst A, Otrokov MM, et al.
    Spectroscopic perspective on the interplay between electronic and magnetic properties of magnetically doped topological insulators
    Physical Review B. 2017; 96(18): 184402. https://doi.org/10.1103/PhysRevB.96.184402
    DORA PSI
  • Buzzi M, Makita M, Howald L, Kleibert A, Vodungbo B, Maldonado P, et al.
    Single-shot Monitoring of Ultrafast Processes via X-ray Streaking at a Free Electron Laser
    Scientific Reports. 2017; 7(1): 7069. https://doi.org/10.1038/s41598-017-07069-z
    DORA PSI
  • Schift H
    High-aspect-ratio nanoimprint process chains
    Microsystems and Nanoengineering. 2017; 3. https://doi.org/10.1038/micronano.2017.17
    DORA PSI
  • Wiktor MI, Weichert D, Howe N, Huang C-Y, Olieric V, Boland C, et al.
    Structural insights into the mechanism of the membrane integral N-acyltransferase step in bacterial lipoprotein synthesis
    Nature Communications. 2017; 8: 15952. https://doi.org/10.1038/ncomms15952
    DORA PSI
  • Kayser Y, David C, Flechsig U, Krempasky J, Schlott V, Abela R
    X-ray grating interferometer for in situ and at-wavelength wavefront metrology
    Journal of Synchrotron Radiation. 2017; 24(1): 150-162. https://doi.org/10.1107/S1600577516017562
    DORA PSI
  • Van Schoot J, Schift H
    Next-generation lithography - An outlook on EUV projection and nanoimprint
    Advanced Optical Technologies. 2017; 6(3-4): 159-162. https://doi.org/10.1515/aot-2017-0040
    DORA PSI
  • Rehanek J, Makita M, Wiegand P, Heimgartner P, Pradervand C, Seniutinas G, et al.
    The hard X-ray Photon Single-Shot Spectrometer of SwissFEL - Initial characterization
    Journal of Instrumentation. 2017; 12(5): P05024. https://doi.org/10.1088/1748-0221/12/05/P05024
    DORA PSI
  • Girovsky J, Nowakowski J, Ali ME, Baljozovic M, Rossmann HR, Nijs T, et al.
    Long-range ferrimagnetic order in a two-dimensional supramolecular Kondo lattice
    Nature Communications. 2017; 8: 15388. https://doi.org/10.1038/ncomms15388
    DORA PSI
  • Dübner M, Naoum M-E, Spencer ND, Padeste C
    From pH- to Light-Response: Postpolymerization Modification of Polymer Brushes Grafted onto Microporous Polymeric Membranes
    ACS Omega. 2017; 2(2): 455-461. https://doi.org/10.1021/acsomega.6b00394
    DORA PSI
  • Szmyt W, Vogel S, Diaz A, Holler M, Gobrecht J, Calame M, et al.
    Protective effect of ultrathin alumina film against diffusion of iron into carbon fiber during growth of carbon nanotubes for hierarchical composites investigated by ptychographic X-ray computed tomography
    Carbon. 2017; 115: 347-362. https://doi.org/10.1016/j.carbon.2016.12.085
    DORA PSI
  • Muntwiler M, Zhang J, Stania R, Matsui F, Oberta P, Flechsig U, et al.
    Surface science at the PEARL beamline of the Swiss Light Source
    Journal of Synchrotron Radiation. 2017; 24(1): 354-366. https://doi.org/10.1107/S1600577516018646
    DORA PSI
  • Mojarad N, Pfohl T, Ekinci Y
    Soft electrostatic trapping in nanofluidics
    Microsystems and Nanoengineering. 2017; 3. https://doi.org/10.1038/micronano.2017.51
    DORA PSI
  • Haitjema J, Zhang Y, Vockenhuber M, Kazazis D, Ekinci Y, Brouwer AM
    Extreme ultraviolet patterning of tin-oxo cages
    Journal of Micro/Nanolithography, MEMS, and MOEMS. 2017; 16(3): 033510 (7 pp.). https://doi.org/10.1117/1.JMM.16.3.033510
    DORA PSI
  • Helfenstein P, Mochi I, Rajeev R, Fernandez S, Ekinci Y
    Coherent diffractive imaging methods for semiconductor manufacturing
    Advanced Optical Technologies. 2017; 6(6): 439-448. https://doi.org/10.1515/aot-2017-0052
    DORA PSI
  • Fan D, Sigg H, Spolenak R, Ekinci Y
    Strain and thermal conductivity in ultrathin suspended silicon nanowires
    Physical Review B. 2017; 96(11): 115307. https://doi.org/10.1103/PhysRevB.96.115307
    DORA PSI
  • Mochi I, Helfenstein P, Mohacsi I, Rajeev R, Kazazis D, Yoshitake S, et al.
    RESCAN: An actinic lensless microscope for defect inspection of EUV reticles
    2017. https://doi.org/10.1117/1.JMM.16.4.041003
    DORA PSI
  • Gerspach MA, Mojarad N, Sharma D, Pfohl T, Ekinci Y
    Nanofluidic lab-on-a-chip trapping devices for screening electrostatics in concentration gradients
    Microelectronic Engineering. 2017; 175: 17-22. https://doi.org/10.1016/j.mee.2016.12.017
    DORA PSI
  • Sharma D, Gerspach MA, Pfohl T, Lim RYH, Ekinci Y
    Single positively charged particle trapping in nanofluidic systems
    Microelectronic Engineering. 2017; 175: 43-49. https://doi.org/10.1016/j.mee.2017.01.001
    DORA PSI
Papers published from 2011 to 2016
List of Publications 2007 - 2011 (PDF)
Laboratory for Micro-
and Nanotechnology
Paul Scherrer Institut
5232 Villigen PSI
Switzerland

Head a.i.
Dr. Yasin Ekinci

Secretary
Ms. Edith Meisel

Tel +41 56 310 2814
Fax +41 56 310 2646

Email: edith.meisel@psi.ch

Photon Science Division

Homepage of PSI Division Photon Science (PSD)