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  6. Advanced Lithography and Metrology

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Laboratory for Micro and Nanotechnology

  • About LMN
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    • Nanotechnology
    • X-ray Optics and Applications
      • X-ray Optics for Imaging and Spectroscopy
        • Fresnel Zone Plate for X-ray Microscopy
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        • Zernike X-ray Phase Contrast Microscopy
        • Fresnel Zone Plates for RIXS
        • Refractive Lenses by 2 Photon 3D Lithography
      • Wavefront Metrology and Manipulation
        • Vortex Fresnel Zone Plates
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      • X-ray Optics for XFELs
        • Diamond Fresnel Zone Plates
        • Beam Splitter Gratings for Spectral Monitoring
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        • X-ray Streaking for Ultrafast Processes
    • Polymer Nanotechnology
      • Nanoimprint Lithography
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      • On-surface Chemistry
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      • EUV Interference Lithography
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nanooptics start.jpg

Advanced Lithography and Metrology

The main focus of the group is performing research in lithography and metrology in particular at short wavelengths.

One of the major activity of the group is the operation and further development of extreme ultraviolet interference lithography. This technique uses EUV light at 13.5 nm wavelength and holographic gratings for the fabrication of periodic and high-resolution nanostructures over large areas with high throughput. With a world record in resolution for photolithography down to 6 nm half pitch, the XIL-II beamline at is the world-leading tool and is used extensively used for both academic and industrial research as well as for commercial applications. EUV-IL provides a unique test center for photoresist testing for semiconductor manufacturers and helps in the development of next generation computer processors and memory chips. At the same time, this novel technology offers new opportunities for academic research by providing nanostructures for various projects.

Moreover, we develop lensless imaging and inspection methods at short wavelengths. A current project is the development of EUV mask inspection using coherent diffraction methods. Our aim is to develop an inspection method with high resolution, sensitivity, and throughput for semiconductor insdustry. We have developed the RESCAN tool at the metrology branch of XIL-II beamline. In addition, we are interested in reflective scatterometry and imaging at visible, DUV, EUV, and soft X-ray wavelengths.

We also work on various topics in nanoscience and technology, including nanophotonics, plasmonics, nanofluidics, and nanocatalysis. Our interest is fundamental understanding of nanoscale phenomena as well as exploring the potential applications. Our know-how and capabilities in advanced nanofabrication and characterization techniques enable us to perform research at the frontiers of nanoscience.


For more information see also XIL-II beamline at the Swiss Light Source.
Here you can contact the members of ALM Group.

Current Research

EUV Interference Lithography
EUV Lensless Imaging
Nanoscience

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Contact

Dr. Yasin Ekinci

Laboratory for Micro-
and Nanotechnology
Paul Scherrer Institut
5232 Villigen PSI
Switzerland

Telephone:
+41 56 310 2824
Telefax:
+41 56 310 2646
E-mail:
yasin.ekinci@psi.ch

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