Cleanroom Laboratories

LMN is operating two cleanroom labs, which are situated in the building ODRA located on the East side of PSI.

The nanotechnology cleanroom is a 170 m2 net clean area (hybrid class 10/class 1000), professionally designed and equipped state-of-the-art cleanroom lab.
The „processing lab" is a semi-cleanroom of ca. 150 m2 with laminar flow boxes in the critical areas and a class 10’000 environment elsewhere. 

SUSS MA8-BA6
:: 200mm Mask Aligner
  :: Photolithography

SUSS MA6-BA6
:: 150mm Mask Aligner
  :: Photolithography

Phable R200
:: Displacement Talbot Lithography
  :: Photolithography

Heidelberg DWL66+
:: 200mm Direct Laser Writer
  :: Maskless Lithography

Raith/Vistec EBPG 5000Plus
:: Electron Beam Direct Writer
  :: Maskless Lithography

Nanoscribe GT
:: Two-photon Direct Writer
  :: Maskless Lithography

Wet Chemistry Area
:: Etching with acids and alkali
  :: Sample Processing

Photolithography Area
:: Exposures Development 
  :: Sample Processing

Oxford PlasmaLab 100
:: ICP Deep Reactive Ion Etcher
  :: Plasma Etching

Sentech SI500
:: ICP Reactive Ion Etcher
  :: Plasma Etching

SPTS Rapier Omega LPX
:: 200mm Deep Reactive Ion Etcher
  :: Plasma Technology

Oxford IonFab 300Plus
:: Ion Milling / Deposition Tool
  :: Plasma Technology

Oxford PlasmaLab 100
:: Reactive Ion Etcher
  :: Plasma Technology

Evatec BAKUNI
:: Physical Vapor Deposition
  :: Thin Film Technology

Oxford PlasmaLab 80 PECVD
:: Plasma Enchanced Chemical Vapor Deposition
  :: Thin Film Technology

Picosun R200
:: Atomic Layer Deposition (ALD)
  :: Thin Film Technology

STEED 
  :: Oxidation Furnace
    :: Thin Film Technology

Leibold UNIVEX
  :: Physical Vapor Deposition (e-gun evaporator)
    :: Thin Film Technology

Zeiss Supra 55VP
:: Scanning Electron Microscope (Variable Pressure mode)
  :: Sample Inspection

Hitachi
:: Scanning Electron Microscope with EDX
  :: Sample Inspection

Leica INM20 & INM100
:: Reflected-Light Microscope 
  :: Sample Inspection

Veeco DEKTAK 8
:: Stylus Profilometer
  :: Sample Inspection