Microlithography: Science and Technology

The Third Edition of "Microlithography: Science and Technology" from Taylor & Francis covers the science and engineering involved in the latest generations of microlithography. Chapter 11 by Doug Resnick (from Canon) and Helmut Schift (from PSI) is a comprehensive overview about "Imprint Lithography" and shows the versatility of this next generation technique not only for the next generation lithography (V-NAND storage chips) but also for a variety of applications in from wire grid polarizers for screens to patterned sapphire substrates for light emitting diodes. PSI has contributed significantly to the understanding and build-up of expertise during the last 25 years.