Skip to main content
  • Paul Scherrer Institut PSI
  • PSI Research, Labs & User Services

Digital User Office

  • Digital User Office
  • DE
  • EN
  • FR
Paul Scherrer Institut (PSI)
Suche
Paul Scherrer Institut (PSI)

Hauptnavigation

  • Research at PSIOpen mainmenu item
    • Research Initiatives
    • Research Integrity
    • Scientific Highlights
    • Scientific Events
    • Scientific Career
    • PSI-FELLOW
    • PSI Data Policy
  • Research Divisions and LabsOpen mainmenu item
    • Overview
    • Research with Neutrons and Muons
    • Photon Science
    • Energy and Environment
    • Nuclear Energy and Safety
    • Biology and Chemistry
    • Large Research Facilities
  • Facilities and InstrumentsOpen mainmenu item
    • Overview
    • Large Research Facilities
    • Facilities
    • PSI Facility Newsletter
  • PSI User ServicesOpen mainmenu item
    • User Office
    • Methods at the PSI User Facilities
    • Proposals for beam time
    • Proposal Deadlines
    • Data Analysis Service (PSD)
    • EU support programmes
  • DE
  • EN
  • FR

Digital User Office (mobile)

  • Digital User Office

You are here:

  1. PSI Home
  2. Labs & User Services
  3. PSD
  4. LMN
  5. Installation of SPTS DRIE

Secondary navigation

Laboratory for Micro and Nanotechnology

  • About LMN
    • Organisational Structure
  • Open Positions
  • People
  • Research Groups
    • Nanotechnology
    • X-ray Optics and Applications
      • X-ray Optics for Imaging and Spectroscopy
        • Fresnel Zone Plate for X-ray Microscopy
        • Blazed X-ray Optics
        • Zernike X-ray Phase Contrast Microscopy
        • Fresnel Zone Plates for RIXS
        • Refractive Lenses by 2 Photon 3D Lithography
      • Wavefront Metrology and Manipulation
        • Vortex Fresnel Zone Plates
        • Grating-based Wavefront Metrology
      • X-ray Optics for XFELs
        • Diamond Fresnel Zone Plates
        • Beam Splitter Gratings for Spectral Monitoring
        • A Delay Line for Ultrafast Pump-Probe Experiments
        • X-ray Streaking for Ultrafast Processes
    • Polymer Nanotechnology
      • Nanoimprint Lithography
      • Three Dimensional Structures
    • Molecular Nanoscience
      • On-surface Chemistry
      • Spins in Molecular Monolayers
      • SiC: Surfaces and Interfaces
      • Our Research Team
    • Advanced Lithography and Metrology
      • EUV Interference Lithography
      • EUV Lensless Imaging
      • ALM Nanoscience
    • Quantum Technologies
      • News and highlights
      • People
      • Open positions
      • Current projects
        • 2D semiconductor devices
        • CDW-based memory devices
        • Imaging quantum many-body states
        • Nonlinear magnonics
        • Rare-earth quantum magnets
        • Strained Germanium laser
      • Techniques
        • Cristallina-Q
        • IR beamline
        • Nano-fabrication
      • Publications
      • QTC@PSI
  • Facilities and Equipment
    • Cleanroom Labs
    • Surface Science Lab
    • Scanning Electron Microscopy
    • Scanning Probe Microscopy
    • PEARL Beamline
    • XIL Facility at the SLS
    • Nanoimprint Facilities
    • Electron Beam Lithography
  • LMN News
  • LMN Highlights
    • Archive
  • Publications
    • Publications 2011 - 2016
11 September 2020

Installation of SPTS Rapier Deep Reactive Ion Etcher

SPTS Rapier system for Si deep reactive ion etching (DRIE) is released for user operation. The system is acquired by PSI as a part of SNF R’Equip project “Advanced Si DRIE tool for highly uniform ultra-deep structuring (SiDRY)”. This versatile tool is equipped with pulsed bias option and sensitive ClaritasTM optical end point detection system. Electrostatic clamping and wafer edge protection systems are both available for three wafer diameters – 100 mm, 150 mm, and 200 mm.

SPTS Rapier DRIE

Sidebar

Contact

Laboratory for Micro-
and Nanotechnology
Paul Scherrer Institut
5232 Villigen PSI
Switzerland

Head a.i.
Dr. Yasin Ekinci

Secretary
Ms. Anne Sacher

Tel +41 56 310 2814
Fax +41 56 310 2646
Email: annekathrin.sacher@psi.ch


Photon Science Division

Homepage of PSI Division Photon Science (PSD)
 

top

Footer

Paul Scherrer Institut

Forschungsstrasse 111
5232 Villigen PSI
Switzerland

Telephone: +41 56 310 21 11
Telefax: +41 56 310 21 99

How to find us
Contact form

Visitor Centre psi forum
School Lab iLab (in German)
Center for Proton Therapy
PSI Education Centre
PSI Guest House
PSI Gastronomie (in German)

 

Service & Support

  • Phone Book/People Search
  • User Office
  • Accelerator Status
  • PSI Publications
  • Suppliers
  • E-Billing
  • Computing
  • Safety (in German)

Career

  • Working at PSI
  • Job Opportunities
  • Training and further education
  • Vocational Training (in German)
  • PSI Education Center

For the media

  • PSI in brief
  • Facts and Figures
  • Media Contact
  • Media Releases
  • Social Media Newsroom

Follow us: Twitter (in English) LinkedIn Youtube Issuu RSS

Footer legal

  • Imprint
  • Terms and Conditions
  • Editors' login