Cleanroom Facilities

LMN cleanroom facilities are available for sample preparation and device fabrication. The cleanrooms combined cover 320m² and are professionally equipped for various kinds of sample preparation and characterization. This includes photolithography, nanoimprint and e-beam lithography, as well as, associated environments for handling chemicals, wet and dry etching, and material deposition. The characterization of the samples is done with scanning electron microscopes, a scanning probe microscope, a profilometer, as well as with a variety of optical microscopes. This way, our experimental samples and devices can be prepared and characterized efficiently in a clean environment directly before measurements.