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Laboratory for X-ray Nanoscience and Technologies (LXN)

  • About LXN
    • Organisational Structure
  • Open Positions
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  • Research Groups
    • X-ray Nano-Optics
      • X-ray Optics for Imaging and Spectroscopy
        • Fresnel Zone Plate for X-ray Microscopy
        • Blazed X-ray Optics
        • Zernike X-ray Phase Contrast Microscopy
        • Fresnel Zone Plates for RIXS
        • Refractive Lenses by 2 Photon 3D Lithography
      • Wavefront Metrology and Manipulation
        • Vortex Fresnel Zone Plates
        • Grating-based Wavefront Metrology
      • X-ray Optics for XFELs
        • Diamond Fresnel Zone Plates
        • Beam Splitter Gratings for Spectral Monitoring
        • A Delay Line for Ultrafast Pump-Probe Experiments
        • X-ray Streaking for Ultrafast Processes
    • Molecular Nanoscience
      • On-surface Chemistry
      • Spins in Molecular Monolayers
      • SiC: Surfaces and Interfaces
      • Our Research Team
    • Advanced Lithography and Metrology
      • EUV Interference Lithography
      • EUV Lensless Imaging
      • ALM Nanoscience
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        • Imaging quantum many-body states
        • Nonlinear magnonics
        • Optical devices & methods
        • Rare-earth quantum magnets
        • Rydberg states in Si ∂-layers
        • Strained Ge laser (former research activity of H. Sigg & collaborators)
        • Van der Waals materials & devices
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    • Surface Science Lab
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    • XIL Facility at the SLS
    • Cleanroom Labs
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Scanning Electron Microscopy

Since 2005 LMN is operating a Zeiss Supra VP55 high resolution field emission scanning electron microscope.

Zeiss Supra VP55 SEM operated by the Lab for Micro and Nanotechnology at PSI
Zeiss Supra VP55 SEM operated by the Lab for Micro and Nanotechnology at PSI

Details of the Instrument

  • Column based on GEMINI principle
  • Installed in 2005
  • Cathode: thermal field emission tip (Schottky-emitter ZrO/W)


Detector possibilities

  1. In Lens detector for secondary electrons gives highest spatial resolution with specification of 1nm at an acceleration voltage of 15kV (Au on C- sample)
  2. Everhardt Thornley detector for secondary electrons
  3. Backscattered electron detector Centaurus especially useful for enhanced material contrast
  4. Variable Pressure detector for imaging e.g. electrically nonconductive, degassing materials without the need for metal coating. This works by charge compensation (positively ionised gas molecules stabilise local charging). Spatial resolution: approx. 3nm @ 15kV

Mit Sidebar

User Support and
Instrument Management
 
Anja Weber
+41 56 310 45 46
anja.weber@psi.ch
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