LMN cleanroom facilities are available for sample preparation and device fabrication. The cleanrooms combined cover 320m2 and are professionally equipped for various kinds of sample preparation and characterization. This includes photolithography, nanoimprint and e-beam lithography, as well as, associated environments for handling chemicals, wet and dry etching, and material deposition. The characterization of the samples is done with scanning electron microscopes, a scanning probe microscope, a profilometer, as well as with a variety of optical microscopes. This way, our experimental samples and devices can be prepared and characterized efficiently in a clean environment directly before measurements.