Cleanroom Laboratories

LMN is operating two cleanroom labs, which are situated in the building of the former reactor "Diorit" located on the East side of PSI.

Cleanroom

The nanotechnology clean room is a 170 m2 net clean area (hybrid class 10/class 1000), professionally designed and equipped state of the art clean room lab.

Photolithography
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Wet Etching
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Dry Etching
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Diffusion Furnaces
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Metallization
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Sample Characterization
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Further equipment for sample characterization such as SEM or AFM/STM is located outside the cleanroom labs.

Process Cleanroom

The „processing lab" is a semi-clean room of ca. 150 m2 with laminar flow boxes in the critical areas and a class 10’000 environment elsewhere. This lab contains two embossing presses for nano-imprint lithography, the Vistec e-beam writer, a UHV sputtering system, photolithography equipment, a wet etching line as well as dry etching.