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Scientific Highlights

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Datum
16 March 2017

High-resolution non-destructive three-dimensional imaging of integrated circuits

Modern nanoelectronics has advanced to a point at which it is impossible to image entire devices and their interconnections non- destructively because of their small feature sizes and the complex three-dimensional structures resulting from their integration on a chip. This metrology gap implies a lack of direct feedback between design and manufacturing processes, and hampers quality control during production, shipment and use.

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23 August 2016

Search for the lepton flavour violating decay μ+→e+γ with the full dataset of the MEG experiment

The final results of the search for the lepton flavour violating decay μ+→e+γ based on the full dataset collected by the MEG experiment at the Paul Scherrer Institut in the period 2009–2013 and totalling 7.5×1014 stopped muons on target are presented.

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Urs Greuter

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