Sputtering Laboratory
Who we are
The lab provides in-house deposition of supermirror coatings for neutron optical elements such as neutron guides, polarizers and focusing tools. We specialize in the development and production of these multilayer system with Ni/Ti up to m=6 and polarizing coatings up to m=4. In addition, we provide our expertise in multi- and single layer deposition to all PSI groups for instrumentation and sample preparation.
What we offer
The sputtering lab is equipped with two inline sputtering machines. We deposit metals, semi-conductors and insulators with an Ar plasma. Typical layer thicknesses range from 1 to 1000 nm.
| Z600 | TIPSI | |
|---|---|---|
|
Maximum area coated |
380 mmx560 mm |
50 mm x 200 mm |
|
Number of targets |
3 |
3 |
|
DC-magnetron sputtering |
Yes |
Yes |
|
RF sputtering |
No |
Yes |
|
Reactive gases |
O2, N2, artificial air |
O2, N2, external port |
|
Substrate cleaning via glow discharge |
Yes |
On demand |
|
Substrate heating during deposition |
No |
Yes |