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Laboratory for Neutron and Muon Instrumentation (LIN)

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Sputtering Laboratory

Who we are

The lab provides in-house deposition of supermirror coatings for neutron optical elements such as neutron guides, polarizers and focusing tools. We specialize in the development and production of these multilayer system with Ni/Ti up to m=6 and polarizing coatings up to m=4.  In addition, we provide our expertise in multi- and single layer deposition to all PSI groups for instrumentation and sample preparation.

What we offer

The sputtering lab is equipped with two inline sputtering machines. We deposit metals, semi-conductors and insulators with an Ar plasma. Typical layer thicknesses range from 1 to 1000 nm.


TIPSI
TIPSI
Leybold Z600
Leybold Z600

  Z600 TIPSI

Maximum area coated

380 mmx560 mm

50 mm x 200 mm

Number of targets

3

3

DC-magnetron sputtering

Yes

Yes

RF sputtering

No

Yes

Reactive gases

O2, N2, artificial air

O2, N2, external port

Substrate cleaning via glow discharge

Yes

On demand

Substrate heating during deposition

No

Yes


For any further information contact Dr. Christine Klauser christine.klauser@psi.ch

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Contact

Laboratory for Neutron and Muon Instrumentation
PSI
CH-5232 Villigen PSI
Switzerland
+41 56 310 20 87
Fax: +41 56 310 2939

Head of LIN
Prof. Dr. Marc Janoschek
+41 56 310 49 87
marc.janoschek@psi.ch


Neutron sources

  • SINQ
  • UCN

SINQ beamlines

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  • BOA Beamline for Neutron Optics

SμS

  • SμS facility
  • SμS instruments

University of Zurich

  • Correlated Quantum Matter Group
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Paul Scherrer Institut

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Switzerland

Telephone: +41 56 310 21 11
Telefax: +41 56 310 21 99

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