Skip to main content
PSI
Centers & Labs
close
Center & Labs To overview
  • PSI Center for Neutron and Muon Sciences
    PSI Center for Neutron and Muon Sciences To overview
    • Laboratory for Particle Physics
    • Laboratory for Neutron Scattering and Imaging
    • Laboratory for Muon Spin Spectroscopy
    • Laboratory for Neutron and Muon Instrumentation
    • Laboratory for Multiscale Materials Experiments
  • PSI Center for Photon Science
    PSI Center for Photon Science To overview
    • Laboratory for Macromolecules and Bioimaging
    • Laboratory for X-ray Nanoscience and Technologies
    • Laboratory Condensed Matter
    • Laboratory for Synchrotron Radiation and Femtochemistry
    • Laboratory for Advanced Spectroscopy and X-ray Sources
    • Laboratory for Non-linear Optics
    • Laboratory for Nano and Quantum Technologies
  • PSI Center for Energy and Environmental Sciences
    PSI Center for Energy and Environmental Sciences To overview
    • Laboratory for Sustainable Energy Carriers and Processes
    • Electrochemistry Laboratory
    • Laboratory of Atmospheric Chemistry
    • Laboratory for Catalysis and Sustainable Chemistry
    • Laboratory for Energy Systems Analysis
    • Laboratory for Battery Science
  • PSI Center for Nuclear Engineering and Sciences
    PSI Center for Nuclear Engineering and Sciences To overview
    • Laboratory for Reactor Physics and Thermal-Hydraulics
    • Hot Laboratory
    • Laboratory for Waste Management
    • Laboratory for Energy Systems Analysis
    • Laboratory for Nuclear Materials
    • Laboratory of Radiochemistry
  • PSI Center for Life Sciences
    PSI Center for Life Sciences To overview
    • Center for Radiopharmaceutical Sciences
    • Laboratory of Biomolecular Research
    • Laboratory of Multiscale Bioimaging
  • PSI Center for Scientific Computing, Theory and Data
    PSI Center for Scientific Computing, Theory and Data To overview
    • Laboratory for Simulation and Modelling
    • Computational and Theoretical Physics
    • Laboratory for Materials Simulations
    • Science IT Infrastructure and Services
  • PSI Center for Accelerator Science and Engineering
    PSI Center for Accelerator Science and Engineering To overview
    • Accelerator Operation and Development (ASA)
    • Electronics and Control Systems (AEK)
    • Accelerator Technology (ABT)
  • PSI Center for Corporate Services
    PSI Center for Corporate Services To overview
    • Finanzen und Dienste
    • Immobilien und Betrieb
    • Infrastruktur und Elektroinstallationen
    • Informationstechnologie
    • Abteilung Strahlenschutz und Sicherheit
    • Kommunikation

Labs, Groups & Projects

Facilities & User Services
close
  • Large Research Facilities
    Large Research Facilities To overview
    • SwissFEL – Swiss X-ray Free Electron Laser
    • SLS – Swiss Light Source
    • SINQ – Swiss Spallation Neutron Source
    • SμS – Swiss Muon Source
    • CHRISP – Swiss Research Infrastructure for Particle Physics
  • User Office
    User Office To overview
    • Data Analysis Service
    • Digital User Office (DUO)
    • EU support programmes
    • Methods at the PSI User Facilities
    • PSI Guest House
    • Proposal Deadlines
    • Proposals for Beam Time
  • PSI Home
  • Jobs
  • Persons
  • Contact
  • PSI Shop
    Language
  • Deutsch
  • English
  • Français
  • Search
BL: SLS/XIL-II
close
  • Beamline Layout
    Beamline Layout To overview
    close
    • Source Characteristics
    • Endstations
    • Status
    Contact
    Iacopo Mochi
    Dr. Iacopo Mochi

    Group Leader "Advanced Lithography and Metrology"

    +41 56 310 45 73
    iacopo.mochi@psi.ch
    Useful links
    • DUO Login
    • User Office
    • SLS Status
  • User Information
    User Information To overview
    close
    • Operation Schedule
    • Manuals
    Contact
    Iacopo Mochi
    Dr. Iacopo Mochi

    Group Leader "Advanced Lithography and Metrology"

    +41 56 310 45 73
    iacopo.mochi@psi.ch
    Useful links
    • DUO Login
    • User Office
    • SLS Status
  • Research
  • Publications
  • Contacts
    Contacts To overview
    close
    • People
    Contact
    Iacopo Mochi
    Dr. Iacopo Mochi

    Group Leader "Advanced Lithography and Metrology"

    +41 56 310 45 73
    iacopo.mochi@psi.ch
    Useful links
    • DUO Login
    • User Office
    • SLS Status
  • PSI Home
  • Jobs
  • Persons
  • Contact
  • PSI Shop
    Language
  • Deutsch
  • English
  • Français
  • Search
  1. PSI Home
  2. PSI Center for Photon Science
  3. SLS – Swiss Light Source
  4. BL: SLS/XIL-II
  5. User Information

Manuals

XIL User Manual (PDF)

Contact

Dr. Iacopo Mochi

Group Leader "Advanced Lithography and Metrology"

iacopo.mochi@psi.ch
+41 56 310 45 73
To profile

User Contact Points at PSI

PSI User Office
DUO Login

For the media

  • Media Releases
  • Contact media centre
  • PSI in brief
  • PSI in numbers

Research

  • PSI Center Highlights
  • Facilities
  • User Office
  • PSI Guest House

Industry

  • Contact Persons
  • PSI Spin-offs
  • Cooperations

Career

  • Job Opportunities
  • Working at PSI
  • Vocational Training
  • Courses at psi

Visit

  • Individual visit
  • For school classes
  • PSI Gastronomy
  • How to find us

Paul Scherrer Institute PSI

Forschungsstrasse 111

5232 Villigen PSI

Switzerland

+41 56 310 21 11

Contact form

Personal Directory

  • Imprint
  • Terms and conditions / Privacy policy
  • Editors' Login

© 2025 PSI