The Thin Films and Interfaces GroupProgress in energy technology is closely related to the development of new functional materials. Advancing competence in the preparation and characterisation of new functional materials is therefore a strategic aim of our group. Due to its focus on application in energy technology, this research program differs from those of Materials Research Departments at other Swiss research institutions.
Speaker: A. Fluri
Date: Monday 05 September 2016 16:30
Speaker: K. Shimamoto
Date: Thursday 08 September 2016 11:00
Speaker: D. Pergolesi
Date: Monday 10 October 2016 16:30
The importance of pressure and mass ratios when depositing multi-element oxide thin films by pulsed laser deposition
Applied Surface Science 389, 126–134 (2016)
Angle-resolved thickness and compositional analyses of BaTiO3, CaTiO3, La0.4Ca0.6MnO3, EuAlO3, and LiMn2O4were performed to study the influence of the background gas pressure when depositing multi-elemental oxide materials.With increasing gas pressure the typical forward directed deposition changesto a constant thickness at all angles. Compositional changes with respect to the target show dependencieson (in order of influence): target material, deposition pressure, and angular location (substrate size). A linear relationship was found between target mass-ratios and compositional deviations. This can lead to compositional deviations of up to 70% for large mass-ratios in certain pressure regimes. Link
Maximum compositional deviations mostly at PLD relevant angular Areas (±10◦) vs. mass-ratios, mostly for 1×10−2mbar. Except for O/Mn and Li/Mn in which the maximum deviations already appear at 1×10−3mbar. Solid squares symbolize RBS measurements, filled triangles ERDA measurements and filled circles data from . Note: O/Mn deviation has a high uncertainty due to the suspicion of ambient water trapping by the amorphous film as described in the “anion composition” section. Error bars are smaller than the symbols except for EuAlO3.