Science Based on EUV-IL structures

Due to its high throughput, high resolution and large area structuring capabilites EUV-IL has provided nanostructures for various research and technology development projects.
  • Stamps for Nanoimprint Lithography
  • Fluidic confinement structures
  • Plasmonics and Metamaterials
  • Polymer grafting
  • Biomaterial Development
  • Catalysis
  • Templated assembly:
      • Block copolymers
      • Protein immobilization
      • Colloidal particles
      • Si-Ge quantum dot arrays
  • Templates for cell growth studies
  • Nanomagnetism
  • Fresnel Zone Plates