Due to its high throughput, high resolution and large area structuring capabilites EUV-IL has provided nanostructures for various research and technology development projects.
Examples for Applications of EUV-IL: a) 3D germanium quantum dots, b) Guided self-assembly of block copolymers, c) structuring of a graphene monolayer, and d) generation of metamaterials
- Stamps for Nanoimprint Lithography
- Fluidic confinement structures
- Plasmonics and Metamaterials
- Polymer grafting
- Biomaterial Development
- Catalysis
- Templated assembly:
- Block copolymers
- Protein immobilization
- Colloidal particles
- Si-Ge quantum dot arrays
- Templates for cell growth studies
- Nanomagnetism
- Fresnel Zone Plates