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Laboratory for Micro and Nanotechnology

  • About LMN Ausgeklappter Submenü Punkt
    • Organisational Structure
  • Open Positions
  • People
  • Research Groups
    • Nanotechnology
    • X-ray Optics and Applications
      • X-ray Optics for Imaging and Spectroscopy
        • Fresnel Zone Plate for X-ray Microscopy
        • Blazed X-ray Optics
        • Zernike X-ray Phase Contrast Microscopy
        • Fresnel Zone Plates for RIXS
        • Refractive Lenses by 2 Photon 3D Lithography
      • Wavefront Metrology and Manipulation
        • Vortex Fresnel Zone Plates
        • Grating-based Wavefront Metrology
      • X-ray Optics for XFELs
        • Diamond Fresnel Zone Plates
        • Beam Splitter Gratings for Spectral Monitoring
        • A Delay Line for Ultrafast Pump-Probe Experiments
        • X-ray Streaking for Ultrafast Processes
    • Polymer Nanotechnology
      • Nanoimprint Lithography
      • Three Dimensional Structures
    • Molecular Nanoscience
      • On-surface Chemistry
      • Spins in Molecular Monolayers
      • SiC: Surfaces and Interfaces
      • Our Research Team
    • Advanced Lithography and Metrology
      • EUV Interference Lithography
      • EUV Lensless Imaging
      • ALM Nanoscience
    • Quantum Technologies
      • News and highlights
      • People
      • Open positions
      • Current projects
        • 2D semiconductor devices
        • CDW-based memory devices
        • Imaging quantum many-body states
        • Nonlinear magnonics
        • Rare-earth quantum magnets
        • Strained Germanium laser
      • Techniques
        • Cristallina-Q
        • IR beamline
        • Nano-fabrication
      • Publications
      • QTC@PSI
  • Facilities and Equipment
    • Cleanroom Labs
    • Surface Science Lab
    • Scanning Electron Microscopy
    • Scanning Probe Microscopy
    • PEARL Beamline
    • XIL Facility at the SLS
    • Nanoimprint Facilities
    • Electron Beam Lithography
  • LMN News
  • LMN Highlights
    • Archive
  • Publications
    • Publications 2011 - 2016

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Laboratory for Micro and Nanotechnology

The Laboratory of Micro and Nanotechnology (LMN) was established in 1993. Since 2000 it belongs to the Photon Science Division of the Paul Scherrer Institute. LMN is dedicated to fundamental and applied research with a focus on:

 

  • Outstanding nanoscience by exploiting the synergies between advanced micro/nanofabrication and PSI’s large scale facilities, in particular the Swiss Light Source (SLS)
  • Enabling innovations in instrumentation (optics, detectors, diagnostics etc.) for large scale facilities by applying nanotechnology
  • Providing advanced micro- and nanofabrication technologies to academic and industrial users, in particular in the area of polymer nanotechnology.

>> LMN research news and highlights

 

Main Areas of Research and Technology Development

  • X-ray Optics and Applications
  • Polymer Nanotechnology
  • Advanced Lithography and Metrology
  • Molecular Nanoscience
  • Quantum Technologies

 

 

 

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Contact

Laboratory for Micro-
and Nanotechnology
Paul Scherrer Institut
5232 Villigen PSI
Switzerland

Head a.i.
Dr. Yasin Ekinci

Secretary
Ms. Anne Sacher

Tel +41 56 310 2814
Fax +41 56 310 2646
Email: annekathrin.sacher@psi.ch

Photon Science Division

Homepage of PSI Division Photon Science (PSD)
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Paul Scherrer Institut

Forschungsstrasse 111
5232 Villigen PSI
Schweiz

Telefon: +41 56 310 21 11
Telefax: +41 56 310 21 99

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