529-0455-00L - Laser for Micro- und Nanostructuring

Semester Autumn Semester
Lecturers T. Lippert
Periodicity yearly course
ECTS Points 2 ECTS Points can be obtained (1)
Lectures Laser.jpg
Time 10:00-12:00 (start at 9:45 with a possible break of 15 min.)
Location HCI D2
Lecture Notes Will be handed out at the first lecture (free of charge)
Topics
Laser-History and Introduction
Micro- and Nanotechnology
Lithography
Non-Optical Lithography I
Photoresists
Laser-Welding/Cutting and Drilling
Laser Cleaning
Laser Ablation as Dry Etching Technique
Laser Ablation of Polymers
Laser Ablation of Polymers Designed for Ablation
Laser-Spectroscopy/Laser and Surfaces I
Lasers and Surfaces II
Thin Films
Notes

1: Oral exam (30 min) for obtaining the credit points