529-0455-00L - Laser for Micro- und Nanostructuring

Semester Autumn Semester
Lecturers T. Lippert
Periodicity yearly course
ECTS Points 2 ECTS Points can be obtained (1)
Laser machining

Time 10:00-12:00 (start at 9:45 with a possible break of 15 min.)
Location HCI D2
Lecture Notes Will be handed out at the first lecture (free of charge)
Topics
Laser-History and Introduction
Micro- and Nanotechnology
Lithography
Non-Optical Lithography INon-optical Lithography-Direct Write
Techologies
Photoresists
Laser-Welding/Cutting and Drilling
Laser Cleaning
Laser Ablation and Medical Applications
Laser Ablation of Polymers
Polymers Designed for Laser Ablation and Laser Ablation in Liquids (Nano Particles)
Laser Induced Backside Wet Etching (Microoptics), Laser spectroscopy, Laser and surfaces
Analysis and Additive Manufacturing by Laser
Thin Films made by Lasers
Notes

1: Oral exam (30 min) for obtaining the credit points