- Beamtime is available through proposals. Please contact the beamline to discuss the feasibility of your experiments.
- Beamtime is available for proprietary experiments, in particular for high-resolution characterization of photoresists developed for EUV lithography.
Proposals have to be submitted using the SLS Digital Users Office (DUO).
Important deadlines for proposal submissions can be found in detail at SLS Proposal Calls.
|Beamlines Call schedule (non-PX)|
|End period, Normal/Test/Pilot||2019/12/31||2020/06/30|