The center piece of the XIL endstation is the exposure chamber which houses the interferometer optics, sample stage and other diagnostic devices. The exposure and the process rooms are in the cleanroom environment equipped with amine filters. In the process room the following equipments are available: Spin-coater, wet-bench, hot-plates, microscope, developer, optical thickness measurement.
Exposure chamber as installed at the XIL endstation.

An overview of the beam line.