LNQ is operating a Zeiss Supra 55VP high resolution hot cathode field emission scanning electron microscope in the PICO cleanroom and a Hitachi Regulus 8239 high resolution cold cathode field emission scanning electron microscope in the Park Innovaare building, outside the PSI cleanroom.
Details of the Zeiss Supra 55 VP SEM
- Column based on GEMINI principle
- Installed in 2005
- Cathode: thermal field emission tip (Schottky-emitter ZrO/W)
Detector possibilities
- In Lens detector for secondary electrons gives highest spatial resolution with specification of 1nm at an acceleration voltage of 15kV (Au on C- sample)
- Everhardt Thornley detector for secondary electrons
- Backscattered electron detector Centaurus especially useful for enhanced material contrast
- Variable Pressure detector for imaging e.g. electrically nonconductive, degassing materials without the need for metal coating. This works by charge compensation (positively ionised gas molecules stabilise local charging). Spatial resolution: approx. 3nm @ 15kV