Cleanroom Laboratories

LMN is operating two cleanroom labs, which are situated in the building of the former reactor "Diorit" located on the East side of PSI.

The nanotechnology cleanroom is a 170 m2 net clean area (hybrid class 10/class 1000), professionally designed and equipped state-of-the-art cleanroom lab.
 

Photolithography
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Wet Etching
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Dry Etching
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Diffusion Furnaces
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Metallization
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Sample Characterization
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Further equipment for sample characterization such as SEM or AFM/STM is located outside the cleanroom labs.
The „processing lab" is a semi-clean room of ca. 150 m2 with laminar flow boxes in the critical areas and a class 10’000 environment elsewhere. This lab contains two embossing presses for nano-imprint lithography, the Vistec e-beam writer, a UHV sputtering system, photolithography equipment, a wet etching line as well as dry etching.