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Ce contenu n'est pas disponible en français.
4 avril 2017

Contact-less micro-polishing

Fig1. Zoom into the micro-lens array as produced and after the new contact-less polishing process developed at PSI/LMN using high energy photons and selective polymer reflow.
Fig1. Zoom into the micro-lens array as produced and after the new contact-less polishing process developed at PSI/LMN using high energy photons and selective polymer reflow.

Researchers at the Paul Scherrer Institute together with the company Heptagon have developed a method to produce micro-optics with ultra-smooth surfaces. This contact-less polishing method is especially important for new 3D lithography methods, which can provide innovative optical functions but suffer from surface roughness and imperfections. When applying the newly developed method, the fabrication time of such micro-optics can be significantly reduced.

Concept of surface confined material modification using high-energy photons with limited penetration depth into the surface of the PMMA used in micro-lens production.
Concept of surface confined material modification using high-energy photons with limited penetration depth into the surface of the PMMA used in micro-lens production.

The key to the success of the new method is the reduction of the glass transition temperature of linear thermoplastic polymers like PMMA which is often used in the production process of micro-optics. This reduction is confined to a surface layer of less than 500 nm by using high-energy photons such as from 172 nm UV light. After heating of the micro-lenses above the glass transition temperature of this very thin layer, the self-arrangement and energy minimization of this thin layer led to the removal of surface roughness in the same size range than the thickness of the modified layer, finally yielding ultra-smooth surfaces.

Original Publication

N. Chidambaram, R. Kirchner, R. Fallica, L. Yu, M. Altana and H. Schift
Selective surface smoothening of polymer microlenses by depth confined softening
Adv. Mater. Technol. 1700018 (2017) 1-10.

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Dr. Helmut Schift

Laboratory for Micro-
and Nanotechnology
Paul Scherrer Institut
5232 Villigen PSI
Switzerland

Telephone:
+41 56 310 2839
Telefax:
+41 56 310 2646
E-mail:
helmut.schift@psi.ch

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