Beamline Layout

The X-ray Interference Lithography facility is built in the same straight section with the SIS beamline. It has its own undulator and optics sharing the same optical hutch with the SIS beamline.
Figure 1: Layout of the XIL-II.
Figure 1: Layout of the XIL-II.

Beamlines at SLS

Get an overview of beamlines at the SLS