Beamline Status

Ressource Status Description
Status optics and monochromator OK Wideband beam with a spectral bandwidth of ~3% used in most EUV-IL exposures. Highly monochromatized beam (<0.1% BW) available for special applications
Status sample and environment OK Standard wafers up to a size of 200 mm diameter as well as chips of various sizes can be exposed in the system
Status endstations and detectors OK  
Status analysis tools OK  
Status operation OK  

Legend: OK PROBLEMS ERROR

Further Information