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529-0455-00L - Laser for Micro- und Nanostructuring
Semester |
Autumn Semester |
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Lecturers |
T. Lippert |
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Periodicity |
yearly course |
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ECTS Points |
2 ECTS Points can be obtained (1) |
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Time |
10:00-12:00 (start at 9:45 with a possible break of 15 min.) |
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Location |
HCI D2 |
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Lecture Notes |
Will be handed out at the first lecture (free of charge) |
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Topics |
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Laser-History and Introduction |
Micro- and Nanotechnology |
Lithography |
Non-Optical Lithography I |
Photoresists |
Laser-Welding/Cutting and Drilling |
Laser Cleaning |
Laser Ablation as Dry Etching Technique |
Laser Ablation of Polymers |
Laser Ablation of Polymers Designed for Ablation |
Laser-Spectroscopy/Laser and Surfaces I |
Lasers and Surfaces II |
Thin Films |
Notes
1:
Oral exam (30 min) for obtaining the credit points