Ricarda Nebling, PhD student at LMN, received a prize at the SPIE Extreme Ultraviolet Conference 2020 for her contribution: “Effects of the illumination NA on EUV mask inspection with coherent diffraction imaging”.
Contact
Ricarda Nebling
Laboratory for Micro- und Nanotechnology
Paul Scherrer Institut, Forschungstrasse 111, 5232 Villigen PSI, Switzerland
Telephone: ++41 56 310 39 74, email: ricarda.nebling@psi.ch