In-situ straining with a MEMS device

Top: Sketch of the operating principle of the MEMS device utilized to generate an in-situ strain to a freestanding film positioned between the two cantilevers of the device;
Bottom: XLD ptychography images of the spin cycloidal configuration of a (001) BiFeO3 freestanding film as a function of the tensile strain applied by the MEMS device.

Researchers from the Microspectroscopy group at PSI in a collaboration with the Politecnico di Milano, the Max-Born-Institute, and the National Cheng Kung University have developed a novel setup for the in situ application of tensile mechanical strains of several percentage points to freestanding ferroic thin films compatible with soft X-ray dichroic ptychography imaging. The work has been published as Editors' suggestion within Physical Review B.

In this work, the researchers have modified a microelectromechanical system (MEMS) device by means of focused ion beam (FIB) milling and subsequently transferred a micrometric lamella cut out of a freestanding thin film between the two cantilevers of the MEMS device. By applying a voltage to the MEMS device, causing the cantilevers to bend outward, a tensile strain up to 10% can be applied to the freestanding film. As the lamella is bridging two separate cantilevers, this setup is compatible with transmission X-ray microscopy.

A proof-of-concept experiment where the performances of the setup were demonstrated was carried out. In this experiment, the ferroelectric and spin cycloidal configuration of a 80 nm thick freestanding (001) BiFeO3 lamella was imaged by soft X-ray dichroic ptychography as a function of the applied strain. A combined rotation and change in the period of the spin cycloid in the BiFeO3 could be successfully investigated.

Contacts:
Dr. Simone Finizio
Swiss Light Source
Paul Scherrer Institut
Telephone: +41 56 310 3961
E-mail: simone.finizio@psi.ch

Dr. Jörg Raabe
Swiss Light Source
Paul Scherrer Institut
Telephone: +41 56 310 5193
E-mail: joerg.raabe@psi.ch

Original Publication:

In situ straining of epitaxial freestanding ferroic films by a microelectromechanical devices - Editors' Suggestion
Simone Finizio, Tim A. Butcher, Maria Cocconcelli, Elisabeth Müller, Lauren J. Riddiford, Jeffrey A. Brock, Chia-Chun Wei, Li-Shu Wang, Jan-Chi Yang, Shih-Wen Huang, Federico Maspero, Riccardo Bertacco, and Jörg Raabe
Physical Review B 113, 134408 (2026), DOI:10.1103/pj3y-qfvb